Development Of 3D Microstructures By Using Grayscale Photolithographic Technique

Development Of 3D Microstructures By Using Grayscale Photolithographic Technique

Perkembangan pesat teknologi seperti bio-chip, peranti pendalir mikro, peranti mikro-optik dan sistem mikro elektro-mekanikal (MEMS) memerlukan keupayaan membina struktur tiga dimensi (3D) yang kompleks di skala mikro. Bagi membina struktur 3D di skala mikro, kebiasaannya beberapa topeng cahaya digu...

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书目详细资料
主要作者:	Lee , Tze Pin
格式:	Thesis
语言:	English
出版:	2016
主题:	T Technology TJ1-1570 Mechanical engineering and machinery
在线阅读:	http://eprints.usm.my/41609/1/Development_Of_3D_Microstructures_By_Using_Grayscale_Photolithographic_Technique.pdf
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