Pemeriksaan Filem SiO2 Yang Dienapkan Di Atas Susbtrat Si Melalui Teknik Pirolisis Semburan Ultrabunyi
Pirolisis semburan ultrabunyi (PSU) telah digunakan untuk mengenapkan filem SiO2 di atas substrat Si. Dalam rangka pengenapan oksida di atas Si, reaktor USP telah direkabentuk dan dibina. Prapenanda yang digunakan sebagai sumber oksida ini adalah berdasarkan larutan Tetraetoksilana dan disediakan de...
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Main Author: | Nugroho, Cahyo Budi |
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Format: | Thesis |
Language: | English |
Published: |
2010
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Subjects: | |
Online Access: | http://eprints.usm.my/41649/1/CAHYO_BUDI.pdf |
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