Simulation And Fabrication Of Ge Islands On Si Metal-Semiconductor-Metal Photodetectors

In this thesis, experimental fabrication and theoretical simulation of Ge islands Si based metal-semiconductor-metal photodetectors have been reported. Radio frequency sputtering was used to deposit Ge thin films on silicon substrates. This is followed by rapid thermal annealing to form Ge islands....

وصف كامل

محفوظ في:
التفاصيل البيبلوغرافية
المؤلف الرئيسي: Sarmast, Hadi Mahmodi Sheikh
التنسيق: أطروحة
اللغة:English
منشور في: 2010
الموضوعات:
الوصول للمادة أونلاين:http://eprints.usm.my/41822/1/HADI_MAHMODI_SHEIKH_SARMAST.pdf
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الوصف
الملخص:In this thesis, experimental fabrication and theoretical simulation of Ge islands Si based metal-semiconductor-metal photodetectors have been reported. Radio frequency sputtering was used to deposit Ge thin films on silicon substrates. This is followed by rapid thermal annealing to form Ge islands. Not only that the annealing produces Ge islands but also wetting layer. The size and density of the islands are greatly influenced by the annealing time.