Simulation And Fabrication Of Ge Islands On Si Metal-Semiconductor-Metal Photodetectors

In this thesis, experimental fabrication and theoretical simulation of Ge islands Si based metal-semiconductor-metal photodetectors have been reported. Radio frequency sputtering was used to deposit Ge thin films on silicon substrates. This is followed by rapid thermal annealing to form Ge islands....

Full description

Saved in:
Bibliographic Details
Main Author: Sarmast, Hadi Mahmodi Sheikh
Format: Thesis
Language:English
Published: 2010
Subjects:
Online Access:http://eprints.usm.my/41822/1/HADI_MAHMODI_SHEIKH_SARMAST.pdf
Tags: Add Tag
No Tags, Be the first to tag this record!
id my-usm-ep.41822
record_format uketd_dc
spelling my-usm-ep.418222019-04-12T05:26:46Z Simulation And Fabrication Of Ge Islands On Si Metal-Semiconductor-Metal Photodetectors 2010-11 Sarmast, Hadi Mahmodi Sheikh QC1 Physics (General) In this thesis, experimental fabrication and theoretical simulation of Ge islands Si based metal-semiconductor-metal photodetectors have been reported. Radio frequency sputtering was used to deposit Ge thin films on silicon substrates. This is followed by rapid thermal annealing to form Ge islands. Not only that the annealing produces Ge islands but also wetting layer. The size and density of the islands are greatly influenced by the annealing time. 2010-11 Thesis http://eprints.usm.my/41822/ http://eprints.usm.my/41822/1/HADI_MAHMODI_SHEIKH_SARMAST.pdf application/pdf en public masters Universiti Sains Malaysia Pusat Pengajian Sains Fizik
institution Universiti Sains Malaysia
collection USM Institutional Repository
language English
topic QC1 Physics (General)
spellingShingle QC1 Physics (General)
Sarmast, Hadi Mahmodi Sheikh
Simulation And Fabrication Of Ge Islands On Si Metal-Semiconductor-Metal Photodetectors
description In this thesis, experimental fabrication and theoretical simulation of Ge islands Si based metal-semiconductor-metal photodetectors have been reported. Radio frequency sputtering was used to deposit Ge thin films on silicon substrates. This is followed by rapid thermal annealing to form Ge islands. Not only that the annealing produces Ge islands but also wetting layer. The size and density of the islands are greatly influenced by the annealing time.
format Thesis
qualification_level Master's degree
author Sarmast, Hadi Mahmodi Sheikh
author_facet Sarmast, Hadi Mahmodi Sheikh
author_sort Sarmast, Hadi Mahmodi Sheikh
title Simulation And Fabrication Of Ge Islands On Si Metal-Semiconductor-Metal Photodetectors
title_short Simulation And Fabrication Of Ge Islands On Si Metal-Semiconductor-Metal Photodetectors
title_full Simulation And Fabrication Of Ge Islands On Si Metal-Semiconductor-Metal Photodetectors
title_fullStr Simulation And Fabrication Of Ge Islands On Si Metal-Semiconductor-Metal Photodetectors
title_full_unstemmed Simulation And Fabrication Of Ge Islands On Si Metal-Semiconductor-Metal Photodetectors
title_sort simulation and fabrication of ge islands on si metal-semiconductor-metal photodetectors
granting_institution Universiti Sains Malaysia
granting_department Pusat Pengajian Sains Fizik
publishDate 2010
url http://eprints.usm.my/41822/1/HADI_MAHMODI_SHEIKH_SARMAST.pdf
_version_ 1747820977345003520