A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors
Zinc oxide (ZnO) and chromium (Cr) doped ZnO thin films were successfully produced by reactive radio frequency co-sputtering of high purity zinc and chromium metal targets. The Cr concentrations were in the range of (1 – 4) atomic percentage. The X – ray diffraction revealed that the ZnO films posse...
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2011
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my-usm-ep.421302019-04-12T05:26:34Z A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors 2011-06 al-Hardan, Naif Hammad Misshin QC1 Physics (General) Zinc oxide (ZnO) and chromium (Cr) doped ZnO thin films were successfully produced by reactive radio frequency co-sputtering of high purity zinc and chromium metal targets. The Cr concentrations were in the range of (1 – 4) atomic percentage. The X – ray diffraction revealed that the ZnO films possessed a polycrystalline structure with a (002) dominant phase grown along the c-axis of the hexagonal structure of the ZnO. The (002) peak was slightly shifted toward higher Bragg angles when the Cr substitutionally replaced the Zn in the ZnO crystals. The films exhibited a uniformly distributed nano grains with a columnar structure. 2011-06 Thesis http://eprints.usm.my/42130/ http://eprints.usm.my/42130/1/NAIF_HAMMAD_MISSHIN_AL-HARDAN.pdf application/pdf en public phd doctoral Universiti Sains Malaysia Pusat Pengajian Sains Fizik |
| institution |
Universiti Sains Malaysia |
| collection |
USM Institutional Repository |
| language |
English |
| topic |
QC1 Physics (General) |
| spellingShingle |
QC1 Physics (General) al-Hardan, Naif Hammad Misshin A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors |
| description |
Zinc oxide (ZnO) and chromium (Cr) doped ZnO thin films were successfully produced by reactive radio frequency co-sputtering of high purity zinc and chromium metal targets. The Cr concentrations were in the range of (1 – 4) atomic percentage. The X – ray diffraction revealed that the ZnO films possessed a polycrystalline structure with a (002) dominant phase grown along the c-axis of the hexagonal structure of the ZnO. The (002) peak was slightly shifted toward higher Bragg angles when the Cr substitutionally replaced the Zn in the ZnO crystals. The films exhibited a uniformly distributed nano grains with a columnar structure. |
| format |
Thesis |
| qualification_name |
Doctor of Philosophy (PhD.) |
| qualification_level |
Doctorate |
| author |
al-Hardan, Naif Hammad Misshin |
| author_facet |
al-Hardan, Naif Hammad Misshin |
| author_sort |
al-Hardan, Naif Hammad Misshin |
| title |
A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors |
| title_short |
A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors |
| title_full |
A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors |
| title_fullStr |
A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors |
| title_full_unstemmed |
A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors |
| title_sort |
study on the fabrication and characterization of sputtered cr doped zno thin film gas sensors |
| granting_institution |
Universiti Sains Malaysia |
| granting_department |
Pusat Pengajian Sains Fizik |
| publishDate |
2011 |
| url |
http://eprints.usm.my/42130/1/NAIF_HAMMAD_MISSHIN_AL-HARDAN.pdf |
| _version_ |
1747821029353324544 |