A Study On The Fabrication And Characterization Of Sputtered Cr Doped Zno Thin Film Gas Sensors
Zinc oxide (ZnO) and chromium (Cr) doped ZnO thin films were successfully produced by reactive radio frequency co-sputtering of high purity zinc and chromium metal targets. The Cr concentrations were in the range of (1 – 4) atomic percentage. The X – ray diffraction revealed that the ZnO films posse...
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| Main Author: | |
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| Format: | Thesis |
| Language: | English |
| Published: |
2011
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| Subjects: | |
| Online Access: | http://eprints.usm.my/42130/1/NAIF_HAMMAD_MISSHIN_AL-HARDAN.pdf |
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