Investigation Of Metal Organic Deposition Derived Cerium Oxide Thin Films On Silicon Wafer

Cerium oxide (CeO2) thin films have been formed on silicon (Si) substrates via metal organic decomposition route in order to resolve the usefulness of this oxide as an alternative gate dielectric for Si-based metal-oxide-semiconductor (MOS) applications. Salts of cerium(III) nitrate and ceriu...

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Main Author:	Jasni, Farah Anis
Format:	Thesis
Language:	English
Published:	2009
Subjects:	TN1-997 Mining engineering Metallurgy
Online Access:	http://eprints.usm.my/42928/1/Farah_Anis_Binti_Jasni24.pdf
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id	my-usm-ep.42928
record_format	uketd_dc
spelling	my-usm-ep.429282019-04-12T05:26:59Z Investigation Of Metal Organic Deposition Derived Cerium Oxide Thin Films On Silicon Wafer 2009-12 Jasni, Farah Anis TN1-997 Mining engineering. Metallurgy Cerium oxide (CeO2) thin films have been formed on silicon (Si) substrates via metal organic decomposition route in order to resolve the usefulness of this oxide as an alternative gate dielectric for Si-based metal-oxide-semiconductor (MOS) applications. Salts of cerium(III) nitrate and cerium(III) acetylacetonate were independently used as the starting material with the addition of methanol and acetic acid to form a constant concentration of 0.25 M. Solution was spin coated on a Si substrate. Conversion to oxide was done by annealing at temperatures ranging from 400oC to 1000oC for 15 minutes in argon. The samples were quenched to room temperature. Chemical analysis via X-ray diffraction methods and Raman spectroscopy indicated that CeO2 formed on the substrate after annealing. Structure and phase composition of the films, after heat treatment, were strongly temperature dependent. Surface morphologies were characterized by field emission scanning electron microscope. The morphologies were strongly dependent on the initial cerium salts being used and temperature of annealing. Films fabricated via cerium(III) nitrate showed apparent cracking and peeling. 2009-12 Thesis http://eprints.usm.my/42928/ http://eprints.usm.my/42928/1/Farah_Anis_Binti_Jasni24.pdf application/pdf en public masters Universiti Sains Malaysia Pusat Pengajian Kejuruteraan Bahan & Sumber Mineral
institution	Universiti Sains Malaysia
collection	USM Institutional Repository
language	English
topic	TN1-997 Mining engineering Metallurgy
spellingShingle	TN1-997 Mining engineering Metallurgy Jasni, Farah Anis Investigation Of Metal Organic Deposition Derived Cerium Oxide Thin Films On Silicon Wafer
description	Cerium oxide (CeO2) thin films have been formed on silicon (Si) substrates via metal organic decomposition route in order to resolve the usefulness of this oxide as an alternative gate dielectric for Si-based metal-oxide-semiconductor (MOS) applications. Salts of cerium(III) nitrate and cerium(III) acetylacetonate were independently used as the starting material with the addition of methanol and acetic acid to form a constant concentration of 0.25 M. Solution was spin coated on a Si substrate. Conversion to oxide was done by annealing at temperatures ranging from 400oC to 1000oC for 15 minutes in argon. The samples were quenched to room temperature. Chemical analysis via X-ray diffraction methods and Raman spectroscopy indicated that CeO2 formed on the substrate after annealing. Structure and phase composition of the films, after heat treatment, were strongly temperature dependent. Surface morphologies were characterized by field emission scanning electron microscope. The morphologies were strongly dependent on the initial cerium salts being used and temperature of annealing. Films fabricated via cerium(III) nitrate showed apparent cracking and peeling.
format	Thesis
qualification_level	Master's degree
author	Jasni, Farah Anis
author_facet	Jasni, Farah Anis
author_sort	Jasni, Farah Anis
title	Investigation Of Metal Organic Deposition Derived Cerium Oxide Thin Films On Silicon Wafer
title_short	Investigation Of Metal Organic Deposition Derived Cerium Oxide Thin Films On Silicon Wafer
title_full	Investigation Of Metal Organic Deposition Derived Cerium Oxide Thin Films On Silicon Wafer
title_fullStr	Investigation Of Metal Organic Deposition Derived Cerium Oxide Thin Films On Silicon Wafer
title_full_unstemmed	Investigation Of Metal Organic Deposition Derived Cerium Oxide Thin Films On Silicon Wafer
title_sort	investigation of metal organic deposition derived cerium oxide thin films on silicon wafer
granting_institution	Universiti Sains Malaysia
granting_department	Pusat Pengajian Kejuruteraan Bahan & Sumber Mineral
publishDate	2009
url	http://eprints.usm.my/42928/1/Farah_Anis_Binti_Jasni24.pdf
_version_	1747821129609773056

Investigation Of Metal Organic Deposition Derived Cerium Oxide Thin Films On Silicon Wafer

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