Development Of WO3 Catalytic Film For Detection Of Ethanol

Tungsten oxide (WO3) films deposited on alumina substrate were prepared by chemical vapor deposition (CVD) using tungsten hexacarbonyl (W(CO)6) powder as precursor. The structural characterization was performed using X-ray diffraction (XRD), field emission scanning electron microscope (FESEM) and at...

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Main Author: Lim, Guat Wei
Format: Thesis
Language:English
Published: 2011
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Online Access:http://eprints.usm.my/43382/1/LIM%20GUAT%20WEI.pdf
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spelling my-usm-ep.433822019-04-12T05:26:28Z Development Of WO3 Catalytic Film For Detection Of Ethanol 2011-11 Lim, Guat Wei TP1-1185 Chemical technology Tungsten oxide (WO3) films deposited on alumina substrate were prepared by chemical vapor deposition (CVD) using tungsten hexacarbonyl (W(CO)6) powder as precursor. The structural characterization was performed using X-ray diffraction (XRD), field emission scanning electron microscope (FESEM) and atomic force microscope (AFM). The responses of WO3 films towards 500 ppm of ethanol vapor were investigated at operating temperatures of 150 to 550oC. Optimization on the preparation condition parameters was performed using one-factor-at-a-time technique. The results showed that sensitivity of the developed WO3 film varied according to its preparation condition which included deposition temperature (200 to 350oC), annealing temperature (500 to 700oC) and ratio Ar(W(CO)6)/O2 (1/6 to 1/3). 2011-11 Thesis http://eprints.usm.my/43382/ http://eprints.usm.my/43382/1/LIM%20GUAT%20WEI.pdf application/pdf en public masters Universiti Sains Malaysia Pusat Pengajian Kejuteraan Kimia
institution Universiti Sains Malaysia
collection USM Institutional Repository
language English
topic TP1-1185 Chemical technology
spellingShingle TP1-1185 Chemical technology
Lim, Guat Wei
Development Of WO3 Catalytic Film For Detection Of Ethanol
description Tungsten oxide (WO3) films deposited on alumina substrate were prepared by chemical vapor deposition (CVD) using tungsten hexacarbonyl (W(CO)6) powder as precursor. The structural characterization was performed using X-ray diffraction (XRD), field emission scanning electron microscope (FESEM) and atomic force microscope (AFM). The responses of WO3 films towards 500 ppm of ethanol vapor were investigated at operating temperatures of 150 to 550oC. Optimization on the preparation condition parameters was performed using one-factor-at-a-time technique. The results showed that sensitivity of the developed WO3 film varied according to its preparation condition which included deposition temperature (200 to 350oC), annealing temperature (500 to 700oC) and ratio Ar(W(CO)6)/O2 (1/6 to 1/3).
format Thesis
qualification_level Master's degree
author Lim, Guat Wei
author_facet Lim, Guat Wei
author_sort Lim, Guat Wei
title Development Of WO3 Catalytic Film For Detection Of Ethanol
title_short Development Of WO3 Catalytic Film For Detection Of Ethanol
title_full Development Of WO3 Catalytic Film For Detection Of Ethanol
title_fullStr Development Of WO3 Catalytic Film For Detection Of Ethanol
title_full_unstemmed Development Of WO3 Catalytic Film For Detection Of Ethanol
title_sort development of wo3 catalytic film for detection of ethanol
granting_institution Universiti Sains Malaysia
granting_department Pusat Pengajian Kejuteraan Kimia
publishDate 2011
url http://eprints.usm.my/43382/1/LIM%20GUAT%20WEI.pdf
_version_ 1747821204894384128