Structural And Optical Properties Of Sputtered Nanocrystalline Indium Nitride On Silicon Substrates

The aim of this project is to study the growth and characterization of nanocrystalline indium nitride (InN) on silicon (Si) substrates by means of various non-contact and non-destructive characterization tools. These include the scanning electron microscopy (SEM), energy dispersive X-ray (EDX)...

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Main Author: Amirhoseiny, Maryam
Format: Thesis
Language:English
Published: 2013
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Online Access:http://eprints.usm.my/43801/1/Maryam%20Amirhoseiny24.pdf
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spelling my-usm-ep.438012019-04-12T05:26:10Z Structural And Optical Properties Of Sputtered Nanocrystalline Indium Nitride On Silicon Substrates 2013-09 Amirhoseiny, Maryam QC1 Physics (General) The aim of this project is to study the growth and characterization of nanocrystalline indium nitride (InN) on silicon (Si) substrates by means of various non-contact and non-destructive characterization tools. These include the scanning electron microscopy (SEM), energy dispersive X-ray (EDX) analysis, atomic force microscopy (AFM), and X-ray diffraction (XRD) for structural characterization, and Fourier transform infrared (FTIR) spectroscopy, micro-Raman spectroscopy, and photoluminescence (PL) spectroscopy for optical characterization. Initial works on the structural and optical characterization of the nanocrystalline InN grown on anisotropic (110) orientation of sillicon (Si) substrates have been carried out. Studies are, however, focused on optimizing the deposition conditions for growing nanocrystalline InN by radio frequency (RF) sputtering method. All deposited films obtained under different deposition conditions were slightly nitrogen-rich, but increasing the RF power provided more InN compounds in stoichiometric form. XRD results revealed wurtzite nanocrystalline InN films with a (101) preferred growth orientation for all deposited films. The strong PL peak was observed in the energy of 1.9 eV at room temperature. This higher value of the bandgap is due to the Moss–Burstein shift effect. 2013-09 Thesis http://eprints.usm.my/43801/ http://eprints.usm.my/43801/1/Maryam%20Amirhoseiny24.pdf application/pdf en public phd doctoral Universiti Sains Malaysia Pusat Pengajian Sains Fizik
institution Universiti Sains Malaysia
collection USM Institutional Repository
language English
topic QC1 Physics (General)
spellingShingle QC1 Physics (General)
Amirhoseiny, Maryam
Structural And Optical Properties Of Sputtered Nanocrystalline Indium Nitride On Silicon Substrates
description The aim of this project is to study the growth and characterization of nanocrystalline indium nitride (InN) on silicon (Si) substrates by means of various non-contact and non-destructive characterization tools. These include the scanning electron microscopy (SEM), energy dispersive X-ray (EDX) analysis, atomic force microscopy (AFM), and X-ray diffraction (XRD) for structural characterization, and Fourier transform infrared (FTIR) spectroscopy, micro-Raman spectroscopy, and photoluminescence (PL) spectroscopy for optical characterization. Initial works on the structural and optical characterization of the nanocrystalline InN grown on anisotropic (110) orientation of sillicon (Si) substrates have been carried out. Studies are, however, focused on optimizing the deposition conditions for growing nanocrystalline InN by radio frequency (RF) sputtering method. All deposited films obtained under different deposition conditions were slightly nitrogen-rich, but increasing the RF power provided more InN compounds in stoichiometric form. XRD results revealed wurtzite nanocrystalline InN films with a (101) preferred growth orientation for all deposited films. The strong PL peak was observed in the energy of 1.9 eV at room temperature. This higher value of the bandgap is due to the Moss–Burstein shift effect.
format Thesis
qualification_name Doctor of Philosophy (PhD.)
qualification_level Doctorate
author Amirhoseiny, Maryam
author_facet Amirhoseiny, Maryam
author_sort Amirhoseiny, Maryam
title Structural And Optical Properties Of Sputtered Nanocrystalline Indium Nitride On Silicon Substrates
title_short Structural And Optical Properties Of Sputtered Nanocrystalline Indium Nitride On Silicon Substrates
title_full Structural And Optical Properties Of Sputtered Nanocrystalline Indium Nitride On Silicon Substrates
title_fullStr Structural And Optical Properties Of Sputtered Nanocrystalline Indium Nitride On Silicon Substrates
title_full_unstemmed Structural And Optical Properties Of Sputtered Nanocrystalline Indium Nitride On Silicon Substrates
title_sort structural and optical properties of sputtered nanocrystalline indium nitride on silicon substrates
granting_institution Universiti Sains Malaysia
granting_department Pusat Pengajian Sains Fizik
publishDate 2013
url http://eprints.usm.my/43801/1/Maryam%20Amirhoseiny24.pdf
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