Study On The Accuracy Of Squeeze Film Damping Calculation With Finite Element Analysis

Squeeze film damping due to the air trapped between oscillating membrane structure and a fixed substrate is a critical consideration in the design of MEMS devices because it can adversely affect the dynamic behaviour of the system. Therefore, the development of MEMS depends highly on the modelling a...

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Main Author:	Harun, Muhammad Syakir
Format:	Thesis
Language:	English
Published:	2013
Subjects:	TJ1-1570 Mechanical engineering and machinery
Online Access:	http://eprints.usm.my/46067/1/Muhammad%20Syakir%20Bin%20Harun.pdf
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id	my-usm-ep.46067
record_format	uketd_dc
spelling	my-usm-ep.460672020-02-03T03:30:25Z Study On The Accuracy Of Squeeze Film Damping Calculation With Finite Element Analysis 2013-12 Harun, Muhammad Syakir TJ1-1570 Mechanical engineering and machinery Squeeze film damping due to the air trapped between oscillating membrane structure and a fixed substrate is a critical consideration in the design of MEMS devices because it can adversely affect the dynamic behaviour of the system. Therefore, the development of MEMS depends highly on the modelling and numerical simulation in order to optimize and verify their design before the batch production process. In this thesis, a method to model squeeze film damping with finite element approach to attain sufficiently high accuracy while considerably reducing the degrees of freedom is proposed, and its effectiveness is studied by comparing with other methods. The numerical analysis was performed using commercial ANSYS software. The structures were modelled using three-dimensional (3D) element and two-dimensional (2D) element. Results obtained by finite element models are compared with existing experimental measurements and analytical solutions. It was found that for the computation of damping coefficient, two-dimensional model yields slightly similar accuracy with three-dimensional model with respect to experimental data for low number of holes. In contrast, for highly perforated membranes, the proposed two-dimensional model is shown to be more accurate. The results clearly validate the proposed model to achieve good accuracy for damping coefficient solution while consuming considerably less computer time and memory. 2013-12 Thesis http://eprints.usm.my/46067/ http://eprints.usm.my/46067/1/Muhammad%20Syakir%20Bin%20Harun.pdf application/pdf en public masters Universiti Sains Malaysia Pusat Pengajian Kejuruteraan Mekanikal
institution	Universiti Sains Malaysia
collection	USM Institutional Repository
language	English
topic	TJ1-1570 Mechanical engineering and machinery
spellingShingle	TJ1-1570 Mechanical engineering and machinery Harun, Muhammad Syakir Study On The Accuracy Of Squeeze Film Damping Calculation With Finite Element Analysis
description	Squeeze film damping due to the air trapped between oscillating membrane structure and a fixed substrate is a critical consideration in the design of MEMS devices because it can adversely affect the dynamic behaviour of the system. Therefore, the development of MEMS depends highly on the modelling and numerical simulation in order to optimize and verify their design before the batch production process. In this thesis, a method to model squeeze film damping with finite element approach to attain sufficiently high accuracy while considerably reducing the degrees of freedom is proposed, and its effectiveness is studied by comparing with other methods. The numerical analysis was performed using commercial ANSYS software. The structures were modelled using three-dimensional (3D) element and two-dimensional (2D) element. Results obtained by finite element models are compared with existing experimental measurements and analytical solutions. It was found that for the computation of damping coefficient, two-dimensional model yields slightly similar accuracy with three-dimensional model with respect to experimental data for low number of holes. In contrast, for highly perforated membranes, the proposed two-dimensional model is shown to be more accurate. The results clearly validate the proposed model to achieve good accuracy for damping coefficient solution while consuming considerably less computer time and memory.
format	Thesis
qualification_level	Master's degree
author	Harun, Muhammad Syakir
author_facet	Harun, Muhammad Syakir
author_sort	Harun, Muhammad Syakir
title	Study On The Accuracy Of Squeeze Film Damping Calculation With Finite Element Analysis
title_short	Study On The Accuracy Of Squeeze Film Damping Calculation With Finite Element Analysis
title_full	Study On The Accuracy Of Squeeze Film Damping Calculation With Finite Element Analysis
title_fullStr	Study On The Accuracy Of Squeeze Film Damping Calculation With Finite Element Analysis
title_full_unstemmed	Study On The Accuracy Of Squeeze Film Damping Calculation With Finite Element Analysis
title_sort	study on the accuracy of squeeze film damping calculation with finite element analysis
granting_institution	Universiti Sains Malaysia
granting_department	Pusat Pengajian Kejuruteraan Mekanikal
publishDate	2013
url	http://eprints.usm.my/46067/1/Muhammad%20Syakir%20Bin%20Harun.pdf
_version_	1747821603840851968

Study On The Accuracy Of Squeeze Film Damping Calculation With Finite Element Analysis

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