Study Of Cu-Doped Zno Films Deposited On Different Substrates Using Magnetron Sputtering

Zinc oxide (ZnO) thin films have emerged as an interesting research area owing to its useful properties. Recently, lots of attention have been given to doped ZnO films with copper (Cu) atom, due to its favourable potential in semiconductor devices. This work was focused on the un-doped and Cu-doped...

Full description

Saved in:

Bibliographic Details
Main Author:	Yusof, Ahmad Sauffi
Format:	Thesis
Language:	English
Published:	2019
Subjects:	T1-995 Technology(General)
Online Access:	http://eprints.usm.my/48925/1/Sauffi%20Yusof%20cut.pdf
Tags:	Add Tag No Tags, Be the first to tag this record!

id	my-usm-ep.48925
record_format	uketd_dc
spelling	my-usm-ep.489252021-04-19T03:49:21Z Study Of Cu-Doped Zno Films Deposited On Different Substrates Using Magnetron Sputtering 2019-02 Yusof, Ahmad Sauffi T1-995 Technology(General) Zinc oxide (ZnO) thin films have emerged as an interesting research area owing to its useful properties. Recently, lots of attention have been given to doped ZnO films with copper (Cu) atom, due to its favourable potential in semiconductor devices. This work was focused on the un-doped and Cu-doped ZnO (CZO) thin films prepared by reactive magnetron sputtering. Different sputtering parameters were introduced to improve the properties of the films mainly by manipulating the Cu content and the type of substrate. The crystal structure, optical properties, surface morphology and electrical properties were investigated by using X-ray diffraction (XRD), ultraviolet-visible (UV-VIS) spectrophotometer, field emission scanning electron microscopy (FE-SEM), atomic force microscopy (AFM) and Hall effect measurement with a four-point Van der Pauw configuration. ZnO and CZO films were deposited on the glass, p-GaN/Al2O3 and n-GaN/Al2O3 substrates using radio frequency magnetron sputtering of ZnO (10wt% Cu doped) target at 200o C. XRD results indicated that ZnO and CZO films with preferential orientation along c-axis that belongs to a hexagonal wurtzite structure were fabricated. The transmittance of all ZnO and CZO films deposited on the glass substrate were more than 85% in the visible region. Optical band gap reduction was observed when Cu introduced into ZnO structure. Deposited CZO films showed a smoother surface as compared to ZnO films. 2019-02 Thesis http://eprints.usm.my/48925/ http://eprints.usm.my/48925/1/Sauffi%20Yusof%20cut.pdf application/pdf en public masters Universiti Sains Malaysia Institut Penyelidikan dan Teknologi nano Optoelektronik
institution	Universiti Sains Malaysia
collection	USM Institutional Repository
language	English
topic	T1-995 Technology(General)
spellingShingle	T1-995 Technology(General) Yusof, Ahmad Sauffi Study Of Cu-Doped Zno Films Deposited On Different Substrates Using Magnetron Sputtering
description	Zinc oxide (ZnO) thin films have emerged as an interesting research area owing to its useful properties. Recently, lots of attention have been given to doped ZnO films with copper (Cu) atom, due to its favourable potential in semiconductor devices. This work was focused on the un-doped and Cu-doped ZnO (CZO) thin films prepared by reactive magnetron sputtering. Different sputtering parameters were introduced to improve the properties of the films mainly by manipulating the Cu content and the type of substrate. The crystal structure, optical properties, surface morphology and electrical properties were investigated by using X-ray diffraction (XRD), ultraviolet-visible (UV-VIS) spectrophotometer, field emission scanning electron microscopy (FE-SEM), atomic force microscopy (AFM) and Hall effect measurement with a four-point Van der Pauw configuration. ZnO and CZO films were deposited on the glass, p-GaN/Al2O3 and n-GaN/Al2O3 substrates using radio frequency magnetron sputtering of ZnO (10wt% Cu doped) target at 200o C. XRD results indicated that ZnO and CZO films with preferential orientation along c-axis that belongs to a hexagonal wurtzite structure were fabricated. The transmittance of all ZnO and CZO films deposited on the glass substrate were more than 85% in the visible region. Optical band gap reduction was observed when Cu introduced into ZnO structure. Deposited CZO films showed a smoother surface as compared to ZnO films.
format	Thesis
qualification_level	Master's degree
author	Yusof, Ahmad Sauffi
author_facet	Yusof, Ahmad Sauffi
author_sort	Yusof, Ahmad Sauffi
title	Study Of Cu-Doped Zno Films Deposited On Different Substrates Using Magnetron Sputtering
title_short	Study Of Cu-Doped Zno Films Deposited On Different Substrates Using Magnetron Sputtering
title_full	Study Of Cu-Doped Zno Films Deposited On Different Substrates Using Magnetron Sputtering
title_fullStr	Study Of Cu-Doped Zno Films Deposited On Different Substrates Using Magnetron Sputtering
title_full_unstemmed	Study Of Cu-Doped Zno Films Deposited On Different Substrates Using Magnetron Sputtering
title_sort	study of cu-doped zno films deposited on different substrates using magnetron sputtering
granting_institution	Universiti Sains Malaysia
granting_department	Institut Penyelidikan dan Teknologi nano Optoelektronik
publishDate	2019
url	http://eprints.usm.my/48925/1/Sauffi%20Yusof%20cut.pdf
_version_	1747821973412511744

Study Of Cu-Doped Zno Films Deposited On Different Substrates Using Magnetron Sputtering

Similar Items