Gallium Nitride (Gan) Based Gas Sensor Using Catalytic Metal
In this work, Pt, Pd, Ag and Ni were deposited on p type and n type of GaN and AIGaN as catalytic metals contact using sputtering system through meta! mask to detect N2, H2 and CH4 gases with different concentrations and different metal thicknesses with a range of SO-300nm. Samples were annealed...
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| Main Author: | |
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| Format: | Thesis |
| Language: | English |
| Published: |
2005
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| Subjects: | |
| Online Access: | http://eprints.usm.my/55540/1/abdo%20yahya.pdf |
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