Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]

Dimensi didalam peranti mickro VLSI semakin berkurangan dengan satu objektif, iaitu untuk meningkatkan laju pengendalian. Device dimension in VLSI circuit constantly shrink with one main objective, i.e. increase in speed.

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Bibliographic Details
Main Author:	Aw, Kean Chin
Format:	Thesis
Language:	English
Published:	2002
Subjects:	QC Physics
Online Access:	http://eprints.usm.my/5568/1/Growth_and_Characterisation_of_Low-k_dielectric_Spin_on_Glass_%28PhD%29.pdf
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id	my-usm-ep.5568
record_format	uketd_dc
spelling	my-usm-ep.55682017-04-14T12:18:39Z Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] 2002-11 Aw, Kean Chin QC Physics Dimensi didalam peranti mickro VLSI semakin berkurangan dengan satu objektif, iaitu untuk meningkatkan laju pengendalian. Device dimension in VLSI circuit constantly shrink with one main objective, i.e. increase in speed. 2002-11 Thesis http://eprints.usm.my/5568/ http://eprints.usm.my/5568/1/Growth_and_Characterisation_of_Low-k_dielectric_Spin_on_Glass_%28PhD%29.pdf application/pdf en public phd doctoral Universiti Sains Malaysia Pusat Pengajian Sains Komputer
institution	Universiti Sains Malaysia
collection	USM Institutional Repository
language	English
topic	QC Physics
spellingShingle	QC Physics Aw, Kean Chin Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]
description	Dimensi didalam peranti mickro VLSI semakin berkurangan dengan satu objektif, iaitu untuk meningkatkan laju pengendalian. Device dimension in VLSI circuit constantly shrink with one main objective, i.e. increase in speed.
format	Thesis
qualification_name	Doctor of Philosophy (PhD.)
qualification_level	Doctorate
author	Aw, Kean Chin
author_facet	Aw, Kean Chin
author_sort	Aw, Kean Chin
title	Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]
title_short	Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]
title_full	Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]
title_fullStr	Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]
title_full_unstemmed	Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]
title_sort	growth and characterisation of low-k dielectric spin on glass [qc585. a963 2002 f rb] [microfiche 7021]
granting_institution	Universiti Sains Malaysia
granting_department	Pusat Pengajian Sains Komputer
publishDate	2002
url	http://eprints.usm.my/5568/1/Growth_and_Characterisation_of_Low-k_dielectric_Spin_on_Glass_%28PhD%29.pdf
_version_	1747819669865103360

Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]

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