Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]
Dimensi didalam peranti mickro VLSI semakin berkurangan dengan satu objektif, iaitu untuk meningkatkan laju pengendalian. Device dimension in VLSI circuit constantly shrink with one main objective, i.e. increase in speed.
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my-usm-ep.55682017-04-14T12:18:39Z Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] 2002-11 Aw, Kean Chin QC Physics Dimensi didalam peranti mickro VLSI semakin berkurangan dengan satu objektif, iaitu untuk meningkatkan laju pengendalian. Device dimension in VLSI circuit constantly shrink with one main objective, i.e. increase in speed. 2002-11 Thesis http://eprints.usm.my/5568/ http://eprints.usm.my/5568/1/Growth_and_Characterisation_of_Low-k_dielectric_Spin_on_Glass_%28PhD%29.pdf application/pdf en public phd doctoral Universiti Sains Malaysia Pusat Pengajian Sains Komputer |
| institution |
Universiti Sains Malaysia |
| collection |
USM Institutional Repository |
| language |
English |
| topic |
QC Physics |
| spellingShingle |
QC Physics Aw, Kean Chin Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] |
| description |
Dimensi didalam peranti mickro VLSI semakin berkurangan dengan satu objektif, iaitu untuk meningkatkan laju pengendalian.
Device dimension in VLSI circuit constantly shrink with one main objective, i.e. increase in speed. |
| format |
Thesis |
| qualification_name |
Doctor of Philosophy (PhD.) |
| qualification_level |
Doctorate |
| author |
Aw, Kean Chin |
| author_facet |
Aw, Kean Chin |
| author_sort |
Aw, Kean Chin |
| title |
Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] |
| title_short |
Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] |
| title_full |
Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] |
| title_fullStr |
Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] |
| title_full_unstemmed |
Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] |
| title_sort |
growth and characterisation of low-k dielectric spin on glass [qc585. a963 2002 f rb] [microfiche 7021] |
| granting_institution |
Universiti Sains Malaysia |
| granting_department |
Pusat Pengajian Sains Komputer |
| publishDate |
2002 |
| url |
http://eprints.usm.my/5568/1/Growth_and_Characterisation_of_Low-k_dielectric_Spin_on_Glass_%28PhD%29.pdf |
| _version_ |
1747819669865103360 |