Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]

Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]

Dimensi didalam peranti mickro VLSI semakin berkurangan dengan satu objektif, iaitu untuk meningkatkan laju pengendalian. Device dimension in VLSI circuit constantly shrink with one main objective, i.e. increase in speed.

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主要作者: Aw, Kean Chin
格式: Thesis
语言:English
出版: 2002
主题:
QC Physics
在线阅读:http://eprints.usm.my/5568/1/Growth_and_Characterisation_of_Low-k_dielectric_Spin_on_Glass_%28PhD%29.pdf
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spelling my-usm-ep.55682017-04-14T12:18:39Z Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021] 2002-11 Aw, Kean Chin QC Physics Dimensi didalam peranti mickro VLSI semakin berkurangan dengan satu objektif, iaitu untuk meningkatkan laju pengendalian. Device dimension in VLSI circuit constantly shrink with one main objective, i.e. increase in speed. 2002-11 Thesis http://eprints.usm.my/5568/ http://eprints.usm.my/5568/1/Growth_and_Characterisation_of_Low-k_dielectric_Spin_on_Glass_%28PhD%29.pdf application/pdf en public phd doctoral Universiti Sains Malaysia Pusat Pengajian Sains Komputer
institution Universiti Sains Malaysia
collection USM Institutional Repository
language English
topic QC Physics
spellingShingle QC Physics
Aw, Kean Chin
Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]
description Dimensi didalam peranti mickro VLSI semakin berkurangan dengan satu objektif, iaitu untuk meningkatkan laju pengendalian. Device dimension in VLSI circuit constantly shrink with one main objective, i.e. increase in speed.
format Thesis
qualification_name Doctor of Philosophy (PhD.)
qualification_level Doctorate
author Aw, Kean Chin
author_facet Aw, Kean Chin
author_sort Aw, Kean Chin
title Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]
title_short Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]
title_full Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]
title_fullStr Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]
title_full_unstemmed Growth and Characterisation of Low-k dielectric Spin on Glass [QC585. A963 2002 f rb] [Microfiche 7021]
title_sort growth and characterisation of low-k dielectric spin on glass [qc585. a963 2002 f rb] [microfiche 7021]
granting_institution Universiti Sains Malaysia
granting_department Pusat Pengajian Sains Komputer
publishDate 2002
url http://eprints.usm.my/5568/1/Growth_and_Characterisation_of_Low-k_dielectric_Spin_on_Glass_%28PhD%29.pdf
_version_ 1747819669865103360

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