Gallium Nitride (GaN) Based Gas Sensor Using Catalytic Metal [TK7871.15.G33 H884 2005 f rb].

Dalam kajian ini, Pt, Pd, Ag dan Ni dimendapkan ke atas GaN dan AlGaN jenis p dan jenis n sebagai sentuhan logam mangkinan dengan menggunakan sistem percikan menerusi topeng logam bagi mengesan gas N2, H2 dan CH4 dengan kepekatan dan ketebalan logam yang berbeza dalam julat dari 50 hinga 300nm. Kemu...

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Main Author:	Omer Hudeish, Abdo Yahya
Format:	Thesis
Language:	English
Published:	2005
Subjects:	TK7800-8360 Electronics
Online Access:	http://eprints.usm.my/8635/1/GALLIUM_NITRIDE_%28GaN%29_BASED_GAS_SENSOR.pdf
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id	my-usm-ep.8635
record_format	uketd_dc
spelling	my-usm-ep.86352017-03-22T02:23:55Z Gallium Nitride (GaN) Based Gas Sensor Using Catalytic Metal [TK7871.15.G33 H884 2005 f rb]. 2005-12 Omer Hudeish, Abdo Yahya TK7800-8360 Electronics Dalam kajian ini, Pt, Pd, Ag dan Ni dimendapkan ke atas GaN dan AlGaN jenis p dan jenis n sebagai sentuhan logam mangkinan dengan menggunakan sistem percikan menerusi topeng logam bagi mengesan gas N2, H2 dan CH4 dengan kepekatan dan ketebalan logam yang berbeza dalam julat dari 50 hinga 300nm. Kemudian, sampel diberi terma yang berbeza dari 500-1000oC selama 5 minit dalam gas argon bagi ciri pengesanan. In this work, Pt, Pd, Ag and Ni were deposited on p type and n type of GaN and AlGaN as catalytic metals contact using sputtering system through metal mask to detect N2, H2 and CH4 gases with different concentrations and different metal thicknesses with a range of 50-300nm. Samples were annealed at various temperatures from 500°C up to 1000°C for 5 min in argon prior to sensing charactersation. 2005-12 Thesis http://eprints.usm.my/8635/ http://eprints.usm.my/8635/1/GALLIUM_NITRIDE_%28GaN%29_BASED_GAS_SENSOR.pdf application/pdf en public phd doctoral Universiti Sains Malaysia Pusat Pengajian Sains Fizik
institution	Universiti Sains Malaysia
collection	USM Institutional Repository
language	English
topic	TK7800-8360 Electronics
spellingShingle	TK7800-8360 Electronics Omer Hudeish, Abdo Yahya Gallium Nitride (GaN) Based Gas Sensor Using Catalytic Metal [TK7871.15.G33 H884 2005 f rb].
description	Dalam kajian ini, Pt, Pd, Ag dan Ni dimendapkan ke atas GaN dan AlGaN jenis p dan jenis n sebagai sentuhan logam mangkinan dengan menggunakan sistem percikan menerusi topeng logam bagi mengesan gas N2, H2 dan CH4 dengan kepekatan dan ketebalan logam yang berbeza dalam julat dari 50 hinga 300nm. Kemudian, sampel diberi terma yang berbeza dari 500-1000oC selama 5 minit dalam gas argon bagi ciri pengesanan. In this work, Pt, Pd, Ag and Ni were deposited on p type and n type of GaN and AlGaN as catalytic metals contact using sputtering system through metal mask to detect N2, H2 and CH4 gases with different concentrations and different metal thicknesses with a range of 50-300nm. Samples were annealed at various temperatures from 500°C up to 1000°C for 5 min in argon prior to sensing charactersation.
format	Thesis
qualification_name	Doctor of Philosophy (PhD.)
qualification_level	Doctorate
author	Omer Hudeish, Abdo Yahya
author_facet	Omer Hudeish, Abdo Yahya
author_sort	Omer Hudeish, Abdo Yahya
title	Gallium Nitride (GaN) Based Gas Sensor Using Catalytic Metal [TK7871.15.G33 H884 2005 f rb].
title_short	Gallium Nitride (GaN) Based Gas Sensor Using Catalytic Metal [TK7871.15.G33 H884 2005 f rb].
title_full	Gallium Nitride (GaN) Based Gas Sensor Using Catalytic Metal [TK7871.15.G33 H884 2005 f rb].
title_fullStr	Gallium Nitride (GaN) Based Gas Sensor Using Catalytic Metal [TK7871.15.G33 H884 2005 f rb].
title_full_unstemmed	Gallium Nitride (GaN) Based Gas Sensor Using Catalytic Metal [TK7871.15.G33 H884 2005 f rb].
title_sort	gallium nitride (gan) based gas sensor using catalytic metal [tk7871.15.g33 h884 2005 f rb].
granting_institution	Universiti Sains Malaysia
granting_department	Pusat Pengajian Sains Fizik
publishDate	2005
url	http://eprints.usm.my/8635/1/GALLIUM_NITRIDE_%28GaN%29_BASED_GAS_SENSOR.pdf
_version_	1747819715464527872

Gallium Nitride (GaN) Based Gas Sensor Using Catalytic Metal [TK7871.15.G33 H884 2005 f rb].

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