Hanizam , H. (2013). Effect of in SITU DC and PDC substrate bias cleaning process on TiN coating adhesion in PVD system.
Chicago Style (17th ed.) CitationHanizam , Hashim. Effect of in SITU DC and PDC Substrate Bias Cleaning Process on TiN Coating Adhesion in PVD System. 2013.
MLA (8th ed.) CitationHanizam , Hashim. Effect of in SITU DC and PDC Substrate Bias Cleaning Process on TiN Coating Adhesion in PVD System. 2013.
Warning: These citations may not always be 100% accurate.