Design And Optimisation Of Microelectroelectromechanical System (MEMS) Cochlear Biomodel

The research and development of cochlear biomodelling has nowadays become one of the common interests in the biomedical research field. The main criterion of the developed cochlear biomodel is to have the ability to work within an audible range of human ear that is between 20 Hz to 20000 Hz. Microel...

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Main Author:	Ngelayang, Thailis Bounya
Format:	Thesis
Language:	English English
Published:	2016
Subjects:	T Technology (General)
Online Access:	http://eprints.utem.edu.my/id/eprint/18180/1/Design%20And%20Optimisation%20Of%20Microelectroelectromechanical%20System%20%28MEMS%29%20Cochlear%20Biomodel%2024%20Pages.pdf http://eprints.utem.edu.my/id/eprint/18180/2/Design%20And%20Optimisation%20Of%20An%20Adaptive%20Microelectromechanical%20System%20%28MEMS%29%20Cochlear%20Biomodel%20-%20cdr%2013888.pdf
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record_format	uketd_dc
institution	Universiti Teknikal Malaysia Melaka
collection	UTeM Repository
language	English English
advisor	Low, Yin Fen
topic	T Technology (General) T Technology (General)
spellingShingle	T Technology (General) T Technology (General) Ngelayang, Thailis Bounya Design And Optimisation Of Microelectroelectromechanical System (MEMS) Cochlear Biomodel
description	The research and development of cochlear biomodelling has nowadays become one of the common interests in the biomedical research field. The main criterion of the developed cochlear biomodel is to have the ability to work within an audible range of human ear that is between 20 Hz to 20000 Hz. Microelectromechanical system (MEMS) is seen to have the potential to be utilised in mimicking the tonotopic organisation behavior of human ear. The developed MEMS cochlear biomodel is designed and simulated by using Comsol Multiphysics software to have the dimension of 0.5 μm thickness, 30 μm wide and length varying from 280 μm to 1000 μm. Five MEMS cochlear biomodel designs which are the Straight Bridge Beam (SBB), Straight Bridge Beam with Centered Diaphragm (SBBCD), Straight Bridge Beam with Centered Mass (SBBCM), Crab Legged and Serpentine, have been suggested in order to examine their resonant frequency performances. Four different materials have been considered which are Aluminium (Al), Copper (Cu), Tantalum (Ta) and Platinum (Pt). The design performance has been further tested in terms of its total surface displacement and capacitive ability. SBBCD MEMS cochlear biomodel that was developed with platinum as its base structure material and tantalum as the added mass material gives the highest resonant frequency performance of 92.87 % operating within the desired audible range. The design provides the total surface displacement ranging from 1.4370 nm to 0.0125 μm. The capacitance reading was also recorded to be 14.875 fF at the shortest beam structure and then increased to 53.125 fF towards the longest beam structure. In order to test its adaptivity, the structure was also tested with a voltage ranges from 0.1 V to 0.5 V. The resonant frequency tuning has been found to decrease in the range of 0.57 % to 4.65 % and the surface displacement has been amplified by ~4 to ~25 times bigger as the voltage increases. Relevant microfabrication steps have been suggested to fabricate SBBCM MEMS cochlear biomodel.
format	Thesis
qualification_name	Master of Philosophy (M.Phil.)
qualification_level	Master's degree
author	Ngelayang, Thailis Bounya
author_facet	Ngelayang, Thailis Bounya
author_sort	Ngelayang, Thailis Bounya
title	Design And Optimisation Of Microelectroelectromechanical System (MEMS) Cochlear Biomodel
title_short	Design And Optimisation Of Microelectroelectromechanical System (MEMS) Cochlear Biomodel
title_full	Design And Optimisation Of Microelectroelectromechanical System (MEMS) Cochlear Biomodel
title_fullStr	Design And Optimisation Of Microelectroelectromechanical System (MEMS) Cochlear Biomodel
title_full_unstemmed	Design And Optimisation Of Microelectroelectromechanical System (MEMS) Cochlear Biomodel
title_sort	design and optimisation of microelectroelectromechanical system (mems) cochlear biomodel
granting_institution	Universiti Teknikal Malaysia Melaka
granting_department	Faculty Of Electronic And Computer Engineering
publishDate	2016
url	http://eprints.utem.edu.my/id/eprint/18180/1/Design%20And%20Optimisation%20Of%20Microelectroelectromechanical%20System%20%28MEMS%29%20Cochlear%20Biomodel%2024%20Pages.pdf http://eprints.utem.edu.my/id/eprint/18180/2/Design%20And%20Optimisation%20Of%20An%20Adaptive%20Microelectromechanical%20System%20%28MEMS%29%20Cochlear%20Biomodel%20-%20cdr%2013888.pdf
_version_	1747833915663450112
spelling	my-utem-ep.181802021-10-10T15:01:37Z Design And Optimisation Of Microelectroelectromechanical System (MEMS) Cochlear Biomodel 2016 Ngelayang, Thailis Bounya T Technology (General) TK Electrical engineering. Electronics Nuclear engineering The research and development of cochlear biomodelling has nowadays become one of the common interests in the biomedical research field. The main criterion of the developed cochlear biomodel is to have the ability to work within an audible range of human ear that is between 20 Hz to 20000 Hz. Microelectromechanical system (MEMS) is seen to have the potential to be utilised in mimicking the tonotopic organisation behavior of human ear. The developed MEMS cochlear biomodel is designed and simulated by using Comsol Multiphysics software to have the dimension of 0.5 μm thickness, 30 μm wide and length varying from 280 μm to 1000 μm. Five MEMS cochlear biomodel designs which are the Straight Bridge Beam (SBB), Straight Bridge Beam with Centered Diaphragm (SBBCD), Straight Bridge Beam with Centered Mass (SBBCM), Crab Legged and Serpentine, have been suggested in order to examine their resonant frequency performances. Four different materials have been considered which are Aluminium (Al), Copper (Cu), Tantalum (Ta) and Platinum (Pt). The design performance has been further tested in terms of its total surface displacement and capacitive ability. SBBCD MEMS cochlear biomodel that was developed with platinum as its base structure material and tantalum as the added mass material gives the highest resonant frequency performance of 92.87 % operating within the desired audible range. The design provides the total surface displacement ranging from 1.4370 nm to 0.0125 μm. The capacitance reading was also recorded to be 14.875 fF at the shortest beam structure and then increased to 53.125 fF towards the longest beam structure. In order to test its adaptivity, the structure was also tested with a voltage ranges from 0.1 V to 0.5 V. The resonant frequency tuning has been found to decrease in the range of 0.57 % to 4.65 % and the surface displacement has been amplified by ~4 to ~25 times bigger as the voltage increases. Relevant microfabrication steps have been suggested to fabricate SBBCM MEMS cochlear biomodel. 2016 Thesis http://eprints.utem.edu.my/id/eprint/18180/ http://eprints.utem.edu.my/id/eprint/18180/1/Design%20And%20Optimisation%20Of%20Microelectroelectromechanical%20System%20%28MEMS%29%20Cochlear%20Biomodel%2024%20Pages.pdf text en public http://eprints.utem.edu.my/id/eprint/18180/2/Design%20And%20Optimisation%20Of%20An%20Adaptive%20Microelectromechanical%20System%20%28MEMS%29%20Cochlear%20Biomodel%20-%20cdr%2013888.pdf text en validuser https://plh.utem.edu.my/cgi-bin/koha/opac-detail.pl?biblionumber=100082 mphil masters Universiti Teknikal Malaysia Melaka Faculty Of Electronic And Computer Engineering Low, Yin Fen 1. Ando, S., Tanaka, K. and Abe, M., 1997. Fishbone Architecture: An Equivalent Mechanical Model of Cochlea and Its Application to Sensors and Actuators. In: International Conference on Solid-state Sensors and Actuators. IEEE Xplore, pp.1027- 1030. 2. 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Design And Optimisation Of Microelectroelectromechanical System (MEMS) Cochlear Biomodel

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