Design And Optimisation Of Microelectroelectromechanical System (MEMS) Cochlear Biomodel

The research and development of cochlear biomodelling has nowadays become one of the common interests in the biomedical research field. The main criterion of the developed cochlear biomodel is to have the ability to work within an audible range of human ear that is between 20 Hz to 20000 Hz. Microel...

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Main Author: Ngelayang, Thailis Bounya
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Language:English
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Published: 2016
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Ngelayang, Thailis Bounya
Design And Optimisation Of Microelectroelectromechanical System (MEMS) Cochlear Biomodel
description The research and development of cochlear biomodelling has nowadays become one of the common interests in the biomedical research field. The main criterion of the developed cochlear biomodel is to have the ability to work within an audible range of human ear that is between 20 Hz to 20000 Hz. Microelectromechanical system (MEMS) is seen to have the potential to be utilised in mimicking the tonotopic organisation behavior of human ear. The developed MEMS cochlear biomodel is designed and simulated by using Comsol Multiphysics software to have the dimension of 0.5 μm thickness, 30 μm wide and length varying from 280 μm to 1000 μm. Five MEMS cochlear biomodel designs which are the Straight Bridge Beam (SBB), Straight Bridge Beam with Centered Diaphragm (SBBCD), Straight Bridge Beam with Centered Mass (SBBCM), Crab Legged and Serpentine, have been suggested in order to examine their resonant frequency performances. Four different materials have been considered which are Aluminium (Al), Copper (Cu), Tantalum (Ta) and Platinum (Pt). The design performance has been further tested in terms of its total surface displacement and capacitive ability. SBBCD MEMS cochlear biomodel that was developed with platinum as its base structure material and tantalum as the added mass material gives the highest resonant frequency performance of 92.87 % operating within the desired audible range. The design provides the total surface displacement ranging from 1.4370 nm to 0.0125 μm. The capacitance reading was also recorded to be 14.875 fF at the shortest beam structure and then increased to 53.125 fF towards the longest beam structure. In order to test its adaptivity, the structure was also tested with a voltage ranges from 0.1 V to 0.5 V. The resonant frequency tuning has been found to decrease in the range of 0.57 % to 4.65 % and the surface displacement has been amplified by ~4 to ~25 times bigger as the voltage increases. Relevant microfabrication steps have been suggested to fabricate SBBCM MEMS cochlear biomodel.
format Thesis
qualification_name Master of Philosophy (M.Phil.)
qualification_level Master's degree
author Ngelayang, Thailis Bounya
author_facet Ngelayang, Thailis Bounya
author_sort Ngelayang, Thailis Bounya
title Design And Optimisation Of Microelectroelectromechanical System (MEMS) Cochlear Biomodel
title_short Design And Optimisation Of Microelectroelectromechanical System (MEMS) Cochlear Biomodel
title_full Design And Optimisation Of Microelectroelectromechanical System (MEMS) Cochlear Biomodel
title_fullStr Design And Optimisation Of Microelectroelectromechanical System (MEMS) Cochlear Biomodel
title_full_unstemmed Design And Optimisation Of Microelectroelectromechanical System (MEMS) Cochlear Biomodel
title_sort design and optimisation of microelectroelectromechanical system (mems) cochlear biomodel
granting_institution Universiti Teknikal Malaysia Melaka
granting_department Faculty Of Electronic And Computer Engineering
publishDate 2016
url http://eprints.utem.edu.my/id/eprint/18180/1/Design%20And%20Optimisation%20Of%20Microelectroelectromechanical%20System%20%28MEMS%29%20Cochlear%20Biomodel%2024%20Pages.pdf
http://eprints.utem.edu.my/id/eprint/18180/2/Design%20And%20Optimisation%20Of%20An%20Adaptive%20Microelectromechanical%20System%20%28MEMS%29%20Cochlear%20Biomodel%20-%20cdr%2013888.pdf
_version_ 1747833915663450112
spelling my-utem-ep.181802021-10-10T15:01:37Z Design And Optimisation Of Microelectroelectromechanical System (MEMS) Cochlear Biomodel 2016 Ngelayang, Thailis Bounya T Technology (General) TK Electrical engineering. Electronics Nuclear engineering The research and development of cochlear biomodelling has nowadays become one of the common interests in the biomedical research field. The main criterion of the developed cochlear biomodel is to have the ability to work within an audible range of human ear that is between 20 Hz to 20000 Hz. Microelectromechanical system (MEMS) is seen to have the potential to be utilised in mimicking the tonotopic organisation behavior of human ear. The developed MEMS cochlear biomodel is designed and simulated by using Comsol Multiphysics software to have the dimension of 0.5 μm thickness, 30 μm wide and length varying from 280 μm to 1000 μm. Five MEMS cochlear biomodel designs which are the Straight Bridge Beam (SBB), Straight Bridge Beam with Centered Diaphragm (SBBCD), Straight Bridge Beam with Centered Mass (SBBCM), Crab Legged and Serpentine, have been suggested in order to examine their resonant frequency performances. Four different materials have been considered which are Aluminium (Al), Copper (Cu), Tantalum (Ta) and Platinum (Pt). The design performance has been further tested in terms of its total surface displacement and capacitive ability. SBBCD MEMS cochlear biomodel that was developed with platinum as its base structure material and tantalum as the added mass material gives the highest resonant frequency performance of 92.87 % operating within the desired audible range. The design provides the total surface displacement ranging from 1.4370 nm to 0.0125 μm. The capacitance reading was also recorded to be 14.875 fF at the shortest beam structure and then increased to 53.125 fF towards the longest beam structure. In order to test its adaptivity, the structure was also tested with a voltage ranges from 0.1 V to 0.5 V. The resonant frequency tuning has been found to decrease in the range of 0.57 % to 4.65 % and the surface displacement has been amplified by ~4 to ~25 times bigger as the voltage increases. Relevant microfabrication steps have been suggested to fabricate SBBCM MEMS cochlear biomodel. 2016 Thesis http://eprints.utem.edu.my/id/eprint/18180/ http://eprints.utem.edu.my/id/eprint/18180/1/Design%20And%20Optimisation%20Of%20Microelectroelectromechanical%20System%20%28MEMS%29%20Cochlear%20Biomodel%2024%20Pages.pdf text en public http://eprints.utem.edu.my/id/eprint/18180/2/Design%20And%20Optimisation%20Of%20An%20Adaptive%20Microelectromechanical%20System%20%28MEMS%29%20Cochlear%20Biomodel%20-%20cdr%2013888.pdf text en validuser https://plh.utem.edu.my/cgi-bin/koha/opac-detail.pl?biblionumber=100082 mphil masters Universiti Teknikal Malaysia Melaka Faculty Of Electronic And Computer Engineering Low, Yin Fen 1. Ando, S., Tanaka, K. and Abe, M., 1997. Fishbone Architecture: An Equivalent Mechanical Model of Cochlea and Its Application to Sensors and Actuators. In: International Conference on Solid-state Sensors and Actuators. IEEE Xplore, pp.1027- 1030. 2. Bachman, M., Zeng, F., Xu, T. and Li, G., 2006. Micromechanical Resonator Array for an Implantable Bionic Ear. Audiology and Neurotology, 11(2), pp.95-103. 3. Bear, M., Connors, B. and Paradiso, M., 2007. Neuroscience. Philadelphia, PA: Lippincott Williams & Wilkins. 4. Békésy, G. and Wever, E., 1960. Experiments in hearing. New York: McGraw-Hill. 5. Benson, T., 2014. Wright 1903 Flyer. [online] Wright.nasa.gov. Available at: http://wright.nasa.gov/airplane/air1903.html [Accessed 5 Mar. 2015]. 6. Bhushan, B., 2010. Springer handbook of nanotechnology, third revised and extended edition. Heidelberg: Springer. 7. Bo, W. and Kwabena, B., 2003. A linear cochlear model with active bi-directional coupling. In: Proceedings of the 25” Annual International Conference of the IEEE EMBS. IEEE Xplore. 8. Cahan, D., 1993. Hermann von Helmholtz and the foundations of nineteenth-century science. Berkeley: University of California Press. 9. Camalet, S., Duke, T., Julicher, F. and Prost, J., 2000. Auditory sensitivity provided by self-tuned critical oscillations of hair cells. Proceedings of the National Academy of Sciences, 97(7), pp.3183-3188. 10. Chan, K., 2004. Biomimetic Sensor Based On The Cochlea. Undergraduate. National University of Singapore. 11. Chaudhuri, R., Basu, J. and Bhattacharyya, T., 2012. Design and Fabrication of Micromachined Resonators. In: International Conference on Smart Materials Structures and Systems. 12. Chen, F., Cohen, H., Bifano, T., Castle, J., Fortin, J., Kapusta, C., Mountain, D., Zosuls, A. and Hubbard, A., 2006. A hydromechanical biomimetic cochlea: Experiments and models. The Journal of the Acoustical Society of America, 119(1), pp.394-405. 13. Chen, Q., Fang, J., Ji, H. and Varahramyan, K., 2008. Isotropic etch for SiO2 microcantilever release with ICP system. Microelectronic Engineering, 85(3), pp.500-507. 14. Dallos, P., Popper, A. and Fay, R., 1996. The Cochlea. New York, NY: Springer New York. 15. Damghanian, M. and Majlis, B., 2009. Novel Design and Fabrication of High Sensitivity MEMS Capacitive Sensor Array for Fingerprint Imaging. AMR, 74, pp.239-242. 16. Deligoz, I., Naqvi, S., Copani, T., Kiaei, S., Bakkaloglu, B., Je, S. and Chae, J., 2011. A MEMS-Based Power-Scalable Hearing Aid Analog Front End. IEEE Trans. Biomed. Circuits Syst., 5(3), pp.201-213. 17. Donnelly, V. and Kornblit, A., 2013. Plasma etching: Yesterday, today, and tomorrow. 18. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 31(5), pp.1-48. 19. Duke, T. and Jülicher, F., 2003. Active Traveling Wave in the Cochlea. Phys. Rev. Lett., 90(15). 20. Eguíluz, V., Ospeck, M., Choe, Y., Hudspeth, A. and Magnasco, M., 2000. Essential Nonlinearities in Hearing. Phys. Rev. Lett., 84(22), pp.5232-5235. 21. Elwenspoek, M. and Jansen, H., 1998. Silicon micromachining. Cambridge [England]: Cambridge University Press. 22. Fahy, F. and Thompson, D., 2014. Fundamentals of Sound and Vibration, Second Edition. Hoboken: CRC Press. 23. Fernández, D., Madrenas, J., Domínguez, M., Pons, J. and Ricart, J., 2008. Pulse drive and 24. capacitance measurement circuit for MEMS electrostatic actuators. Analog Integrated Circuits and Signal Processing, 57(3), pp.225-232. 25. Gad-el-Hak, M., 2006. MEMS. Boca Raton: CRC/Taylor & Francis. 26. Gray, C., 2013. FLYING MACHINES - Clement Ader. [online] Flyingmachines.org. Available at: http://www.flyingmachines.org/ader.html [Accessed 5 Mar. 2015]. 27. Han, S., Benaroya, H. and Wei, T., 1999. Dynamics Of Transversely Vibrating Beams Using Four Engineering Theories. Journal of Sound and Vibration, 225(5), pp.935-988. 28. Haronian, D. and C. MacDonald, N., 1995. A Microelectromechanics Based Artificial Cochlea (MEMBAC). In: The 8th International Conference on Solid-state Sensors and Actuators, and Eurosensors IX. pp.708-711. 29. Haronian, D. and MacDonald, N., 1996. A microelectromechanics-based frequency- signature sensor. Sensors and Actuators A: Physical, 53(1-3), pp.288-298. 30. Hayashi, T., 2013. Recent Development of Si Chemical Dry Etching Technologies. J Nanomed Nanotechnol, 04(05), pp.1-6. 31. Helmholtz, H. and Ellis, A., 1954. On the Sensations of tone as a physiological basis for the theory of music. New York: Dover Publications. 32. Helmholtz, H. and Ellis, A., 2011. On the sensations of tone as a physiological basis for the theory of music. New York: Cambridge University Press. 33. Howe, R., 1994. Applications Of Silicon Micromachining To Resonator Fabrication. In: 1994 IEEE International Frequency Control Symposium. pp.2-7. 34. Jang, J., Lee, J., Woo, S., Sly, D., Campbell, L., Cho, J., O’Leary, S., Park, M., Han, S., Choi, J., Hun Jang, J. and Choi, H., 2015. A microelectromechanical system artificial basilar membrane based on a piezoelectric cantilever array and its characterization using an animal model. Scientific Reports, 5. 35. Je, S., Harrison, J., Kozicki, M., Bakkaloglu, B., Kiaei, S. and Chae, J., 2009. In situ tuning of a MEMS microphone using electrodeposited nanostructures. J. Micromech. Microeng., 19(3), pp.1-8. 36. Joyce, B. and Tarazaga, P., 2014. Mimicking the cochlear amplifier in a cantilever beam using nonlinear velocity feedback control. Smart Mater. Struct., 23(7), pp.75019-75023. 37. Kaskel, A., Hummer, P. and Daniel, L., 1999. Biology. New York, N.Y.: Glencoe/McGraw-Hill. 38. Kastenmeier, B., 1996. Chemical dry etching of silicon nitride and silicon dioxide using CF4/O2/N2 gas mixtures. Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 14(5), pp.2802-2813. 39. Kim, H., Song, T. and Ahn, K., 2011. Sharply tuned small force measurement with a biomimetic sensor. Appl. Phys. Lett., 98(1), pp.1-3. 40. Kolston, P., 1998. Towards A Better Understanding Of Cochlear Mechanics: A New Cochlear Model. Ph.D. University of Canterbury. 41. Korvink, J. and Paul, O., 2006. MEMS. Norwich, NY: W. Andrew Pub. 42. Kovacs, G. and Maluf, N., 1998. Bulk Micromachining of Silicon. PROCEEDINGS OF THE IEEE, 86(8), pp.1536-1551. 43. Kramer, T. and Paul, O., 2001. Surface micromachined ring test structures to determine mechanical properties of compressive thin films. Sensors and Actuators A: Physical, 92(1- 3), pp.292-298. 44. Kunii, Y., 1995. Wet Etching of Doped and Nondoped Silicon Oxide Films Using Buffered Hydrogen Fluoride Solution. Journal of The Electrochemical Society, 142(10), pp.3510-3513. 45. Lamberts, K. and Goldstone, R., 2005. Handbook of cognition. London: SAGE. 46. Latif, R., 2012. Microelectromechanical Systems for Biomimetical Application. Ph. D. University of Edinburgh. 47. Latif, R., Mastropaolo, E., Bunting, A., Cheung, R., Koickal, T., Hamilton, A., Newton, M. and Smith, L., 2010. Microelectromechanical systems for biomimetical applications. J. Vac. Sci. Technol. B, 28(6), pp.1-6. 48. Lawand, N., Ngamkham, W., French, P., Serdijn, W., Gaydadjiev, G., Briaire, J. and Frijns, J., 2013. An improved system approach towards future cochlear implants. In: 35th Annual International Conference of the IEEE EMBS. IEEE Xplore. 49. Lechner, T., 1993. A hydromechanical model of the cochlea with nonlinear feedback using PVF2 bending transducers. Hearing Research, 66(2), pp.202-212. 50. Lee, K. and Lin, L., 2004. Surface micromachined glass and polysilicon microchannels using MUMPs for BioMEMS applications. Sensors and Actuators A: Physical, 111(1), pp.44-50. 51. Lee, K., 2010. Principles of MEMS. Hoboken, N.J.: WILEY. 52. Lee, Y., Jung, Y., Kwak, J. and Hur, S., 2013. Design and Fabrication of One-Chip MEMS Microphone for the Hearing Impaired. AMM, 461, pp.577-580. 53. Li, Y. and Grosh, K., 2012. Direction of wave propagation in the cochlea for internally excited basilar membrane. The Journal of the Acoustical Society of America, 131(6), pp.4710-4721. 54. Lindroos, V., 2010. Handbook of silicon based MEMS. Norwich, N.Y.: William Andrew. 55. Lüling, H., Franosch, J. and Leo van Hemmen, J., 2010. A two-dimensional cochlear fluid model based on conformal mapping. The Journal of the Acoustical Society of America, 128(6), pp.3577-3584. 56. Luttge, R., 2011. Microfabrication for industrial applications. Oxford: William Andrew. 57. Lyon, R.F., Katsiamis, A.G. and Drakakis, E.M., 2010. History and future of auditory filter models. ISCAS 2010 - 2010 IEEE International Symposium on Circuits and Systems: Nano-Bio Circuit Fabrics and Systems, pp.3809–3812. 58. Lyshevski, S., 2002. MEMS and NEMS. Boca Raton, Fla.: CRC Press. 59. Madou, M., 2012. Fundamentals of microfabrication and nanotechnology. Boca Raton, FL: CRC Press. 60. Martignoli, S., van der Vyver, J., Kern, A., Uwate, Y. and Stoop, R., 2007. Analog electronic cochlea with mammalian hearing characteristics. Appl. Phys. Lett., 91(6), pp.1-3. 61. Meninger, S., Mur-Miranda, J., Amirtharajah, R., Chandrakasan, A. and Lang, J., 2001. Vibration-to-electric energy conversion. IEEE Transactions on Very Large Scale Integration (VLSI) Systems, 9(1), pp.64-76. 62. Moore, B., 2012. An introduction to the psychology of hearing. Bingley: Emerald. 63. Nojiri, K., 2014. Mechanism of Dry Etching. Dry Etching Technology for Semiconductors, pp.11-30. 64. Oder, T., Martin, P., Adedeji, A., Isaacs-Smith, T. and Williams, J., 2007. Improved Schottky Contacts on n-Type 4H-SiC Using ZrB2 Deposited at High Temperatures. Journal of Electronic Materials, 36(7), pp.805-811. 65. Olson, E., Duifhuis, H. and Steele, C., 2012. Von Békésy and cochlear mechanics. Hearing Research, 293(1-2), pp.31-43. 66. Peng, L., Zhang, Z. and Wang, S., 2014. Carbon nanotube electronics: recent advances. 67. Materials Today, 17(9), pp.433-442. 68. Proulx, T., 2011. Proceedings of the 2011 Annual Conference on Experimental and Applied Mechanics. New York: Springer. 69. Pryor, R., 2011. Multiphysics modeling using COMSOL. Sudbury, Mass.: Jones and Bartlett Publishers. 70. Qu, H., Yu, H., Zhou, W., He, X., Du, L. and Peng, B., 2015. Design of Minimal Capacitance Detect Circuit for MEMS Capacitive Sensor. KEM, 645-646, pp.824-829. 71. Rajput, A., 2013. Simulation of R-L-C Series and Parallel Resonance in Basic Electrical Engineering with LabVIEW. Research Journal of Engineering Sciences, 2(1), pp.45-49. 72. Rana, S., Chowdhury, A., Al Amin, R., Talukder, S., Hasan, M. and Hasan, M., 2014. Deposition of Copper and Aluminium Thin Films on Glass and Silicon Wafer Substrates in Particle Controlled BAEC Clean Room. International Journal of Engineering Research & Technology (IJERT), 3(6), pp.418-424. 73. Ranke, O., 1950. Theory of Operation of the Cochlea: A Contribution to the Hydrodynamics of the Cochlea. The Journal of the Acoustical Society of America, 22(6), pp.772-777. 74. Ratnayake, D., Martin, M., Gowrishetty, U., Porter, D., Berfield, T., McNamara, S. and Walsh, K., 2015. Engineering stress in thin films for the field of bistable MEMS. J. Micromech. Microeng., 25(12), pp.125025-125031. 75. Reichenbach, T. and Hudspeth, A., 2011. Unidirectional Mechanical Amplification as a Design Principle for an Active Microphone. Phys. Rev. Lett., 106(15). 76. Rocha, L., Cretu, E. and Wolffenbuttel, R., 2004. Analysis and Analytical Modeling of Static Pull-In With Application to MEMS-Based Voltage Reference and Process Monitoring. Journal of Microelectromechanical Systems, 13(2), pp.342-354. 77. Rossetto, M., 2015. An Engineer’s View of Hair Cell Function: A Theory of Capacitive Transduction. Natural Science, 07(03), pp.158-164. 78. Sahoo, R. and Mishra, R., 2009. Simulations of Carbon Nanotube Field Effect Transistors. 79. International Journal of Electronic Engineering Research, 1(2), pp.117-125. 80. Sang-Soo, J., 2009. Microdevices For Hearing Aid Applications. Ph.D. Arizona State University. 81. Schmitt, O., 1969. Some Interesting and Useful Biomimetic Transforms. In: Third International Biophysics Congress of the International Union for Pure and Applied Biophysics. Cambridge: Massachusetts Institute of Technology, pp.297. 82. Shikida, M., Sato, K., Tokoro, K. and Uchikawa, D., 2000. Differences in anisotropic etching properties of KOH and TMAH solutions. Sensors and Actuators A: Physical, 80(2), pp.179-188. 83. Shuangqin, L., Douglas, A., Ethan, M. and Robert, D., 2008. Experimental Investigation Of A Hydromechanical Scale Model Of The Gerbil Cochlea. In: Proceedings of IMECE 2008 ASME 2008 International Mechanical Engineering Congress and Exposition. 84. Sininger, Y., 2009. An Introduction to the Physiology of Hearing, Third Edition. Ear and Hearing, 30(3), pp.386-387. 85. Sumant, P., Cangellaris, A. and Aluru, N., 2011. A conformal mapping-based approach for fast two-dimensional FEM electrostatic analysis of MEMS devices. Int. J. Numer. Model., 24(2), pp.194-206. 86. Sutagundar, M., Sheeparamatti, B. and Jangamshetti, D., 2014. Research Issues in MEMS Resonators. Research Inventy: International Journal of Engineering And Science, 4(8), pp.29-39. 87. Tanujaya, H., Shintaku, H., Kitagawa, D., Adianto, A., Susilodinata, S. and Kawano, S., 2013. Experimental and Analytical Study Approach of Artificial Basilar Membrane Prototype (ABMP). Journal of Engineering and Technological Sciences, 45(1), pp.61-72. 88. Tong, H., Zwijze, R., Berenschot, J., Wiegerink, R., Krijnen, G. and Elwenspoek, M. (2000). Characterization of Platinum Lift-Off Technique. In: Proceedings of the SeSens Workshop on Semiconductor Sensor and Actuator Technology. 89. Vincent, J., Bogatyreva, O., Bogatyrev, N., Bowyer, A. and Pahl, A., 2006. Biomimetics: its practice and theory. Journal of The Royal Society Interface, 3(9), pp.471-482. 90. Wesam Al-Mufti, M., Hashim, U. and Adam, T., 2013. The State of the Arts: Simulation of Nanostructures Using COMSOL Multiphysics. AMR, 832, pp.206-211. 91. White, R. and Grosh, K., 2002. Design and Characterization of a MEMS Piezoresistive Cochlear-Like Acoustic Sensor. In: ASME 2002 International Mechanical Engineering Congress and Exposition. The American Society of Mechanical Engineers, pp.201-210. 92. White, R. and Grosh, K., 2002. Micromachined cochlear-like acoustic sensor. In: Proc. SPIE 4700, Smart Structures and Materials 2002: Smart Electronics, MEMS, and Nanotechnology. 93. Wittbrodt, M., Steele, C. and Puria, S., 2006. Developing a Physical Model of the Human Cochlea Using Microfabrication Methods. Audiology and Neurotology, 11(2), pp.104-112. Wolf, S., 2002. Silicon processing for the VLSI era. Sunset Beach, Calif.: Lattice Press. 94. Xiao, Z., Hao, Y., Li, T., Zhang, G., Liu, S. and Wu, G., 1999. A new release process for polysilicon surface micromachining using sacrificial polysilicon anchor and photolithography after sacrificial etching. J. Micromech. Microeng., 9(4), pp.300-304. 95. Young, D., Zurcher, M., Semaan, M., Megerian, C. and Ko, W., 2012. MEMS Capacitive Accelerometer-Based Middle Ear Microphone. IEEE Transactions on Biomedical Engineering, 59(12), pp.3283-3292. 96. Zerlin, S., 1969. Traveling-Wave Velocity in the Human Cochlea. The Journal of the Acoustical Society of America, 46(4B), pp.1011-1015. 97. Zheng, B., Zhou, C., Wang, Q., Chen, Y. and Xue, W., 2013. Deposition of Low Stress Silicon Nitride Thin Film and Its Application in Surface Micromachining Device Structures. Advances in Materials Science and Engineering, 2013, pp.1-4.