Design Of Spring-Supported Diaphragm Capacitive MEMS Microphone
In this research project, the design and performance optimization techniques of a microelectromechanical (MEMS) condenser microphone will be studied and described using several established plate theories and numerical analysis. MEMS microphone is shown to have been increasingly popular to be used i...
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| Format: | Thesis |
| Language: | English |
| Published: |
2016
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| Subjects: | |
| Online Access: | http://eprints.utem.edu.my/id/eprint/18844/1/Design%20Of%20Spring-Supported%20Diaphragm%20Capacitive%20MEMS%20Microphone%2024%20Pages.pdf |
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