Fabrication Of Lead Free Piezoelectric Ceramics For Energy Harvesting Applications

Fabrication Of Lead Free Piezoelectric Ceramics For Energy Harvesting Applications

Energy harvesting is a process by collecting a small amount of energy from the ambient environment.In this research,the concept of energy harvesting system was implemented using thick film piezoelectric ceramics transforming mechanical vibration energy into electrical energy.In line with the growing...

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Main Author: Mohd Radzi, Muhamad Haffiz
Format: Thesis
Language:English
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Published: 2017
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T Technology (General)
Online Access:http://eprints.utem.edu.my/id/eprint/23291/1/Fabrication%20Of%20Lead%20Free%20Piezoelectric%20Ceramics%20For%20Energy%20Harvesting%20Applications.pdf
http://eprints.utem.edu.my/id/eprint/23291/2/Fabrication%20Of%20Lead%20Free%20Piezoelectric%20Ceramics%20For%20Energy%20Harvesting%20Applications.pdf
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T Technology (General)
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T Technology (General)
Mohd Radzi, Muhamad Haffiz
Fabrication Of Lead Free Piezoelectric Ceramics For Energy Harvesting Applications
description Energy harvesting is a process by collecting a small amount of energy from the ambient environment.In this research,the concept of energy harvesting system was implemented using thick film piezoelectric ceramics transforming mechanical vibration energy into electrical energy.In line with the growing awareness of the environmental hazards with the present of lead,this thesis proposed two types of lead free ceramic material: barium titanate (BaTiO3) and potassium sodium niobate (KNN).The major challenges for energy harvesting from a lead free piezoelectric device are that the electrical output power is relatively small compared to the minimum requirement of electrical power for operating small electronic devices.The main objective of the project is to fabricate thick film lead free piezoelectric ceramic which able to produce high output power for the application of energy harvesting.In order to fabricate lead free thick film piezoelectric ceramics,thick film technology is selected due to its simplicity and low cost compared to thin film technology.One of the performance indicators for a piezoelectric energy harvesting material is the measurement of the piezoelectric charge coefficient,d33.Two of the materials,BaTiO3 and KNN were characterized and studied to compare its performance.The fabrication process involves the development of lead free piezoelectric paste,thick film screen printing and electrical polarization.The lead free piezoelectric paste was developed by mixing a composition of functional element and permanent binder in the powder form and pine oil as the temporary binder to make the paste printable. The lead free piezoelectric ceramic was fabricated by screen printing a few layers of piezoelectric film,which stack on top of an electrode layer on a substrate and finished with another layer of electrodes on the top of the sandwiched structure of electrode-piezoelectric-electrode.The polarization was performed by applying high DC electric fields at ranges of up to 2 kV at an elevated temperature of around 250 C using hotplate.The performance of each of the lead free thick film piezoelectric ceramic was evaluated based on its charge coefficients,voltages output,and power output.The parameters of the film were varied with different screen printing process,co-firing duration and controlled temperature rate to determine the optimum lead-free piezoelectric ceramics.The result shows that the piezoelectric charge coefficient of KNN is 38 pC/N for a thickness of 140 μm which is able to generate a maximum power of 12.25 nW at external resistive load of 25 kΩ which is better performed compared to BaTiO3 with d33 of 25 pC/N and maximum output power of 0.423 nW for the similar thickness and external resistive load.In conclusion from this experimental result,it shows that KNN thick film performs better compared to BaTiO3 thick film as an energy harvesting material.
format Thesis
qualification_name Master of Philosophy (M.Phil.)
qualification_level Master's degree
author Mohd Radzi, Muhamad Haffiz
author_facet Mohd Radzi, Muhamad Haffiz
author_sort Mohd Radzi, Muhamad Haffiz
title Fabrication Of Lead Free Piezoelectric Ceramics For Energy Harvesting Applications
title_short Fabrication Of Lead Free Piezoelectric Ceramics For Energy Harvesting Applications
title_full Fabrication Of Lead Free Piezoelectric Ceramics For Energy Harvesting Applications
title_fullStr Fabrication Of Lead Free Piezoelectric Ceramics For Energy Harvesting Applications
title_full_unstemmed Fabrication Of Lead Free Piezoelectric Ceramics For Energy Harvesting Applications
title_sort fabrication of lead free piezoelectric ceramics for energy harvesting applications
granting_institution UTeM
granting_department Faculty Of Electronic And Computer Engineering
publishDate 2017
url http://eprints.utem.edu.my/id/eprint/23291/1/Fabrication%20Of%20Lead%20Free%20Piezoelectric%20Ceramics%20For%20Energy%20Harvesting%20Applications.pdf
http://eprints.utem.edu.my/id/eprint/23291/2/Fabrication%20Of%20Lead%20Free%20Piezoelectric%20Ceramics%20For%20Energy%20Harvesting%20Applications.pdf
_version_ 1747834028693651456
spelling my-utem-ep.232912022-02-18T15:24:22Z Fabrication Of Lead Free Piezoelectric Ceramics For Energy Harvesting Applications 2017 Mohd Radzi, Muhamad Haffiz T Technology (General) TK Electrical engineering. Electronics Nuclear engineering Energy harvesting is a process by collecting a small amount of energy from the ambient environment.In this research,the concept of energy harvesting system was implemented using thick film piezoelectric ceramics transforming mechanical vibration energy into electrical energy.In line with the growing awareness of the environmental hazards with the present of lead,this thesis proposed two types of lead free ceramic material: barium titanate (BaTiO3) and potassium sodium niobate (KNN).The major challenges for energy harvesting from a lead free piezoelectric device are that the electrical output power is relatively small compared to the minimum requirement of electrical power for operating small electronic devices.The main objective of the project is to fabricate thick film lead free piezoelectric ceramic which able to produce high output power for the application of energy harvesting.In order to fabricate lead free thick film piezoelectric ceramics,thick film technology is selected due to its simplicity and low cost compared to thin film technology.One of the performance indicators for a piezoelectric energy harvesting material is the measurement of the piezoelectric charge coefficient,d33.Two of the materials,BaTiO3 and KNN were characterized and studied to compare its performance.The fabrication process involves the development of lead free piezoelectric paste,thick film screen printing and electrical polarization.The lead free piezoelectric paste was developed by mixing a composition of functional element and permanent binder in the powder form and pine oil as the temporary binder to make the paste printable. The lead free piezoelectric ceramic was fabricated by screen printing a few layers of piezoelectric film,which stack on top of an electrode layer on a substrate and finished with another layer of electrodes on the top of the sandwiched structure of electrode-piezoelectric-electrode.The polarization was performed by applying high DC electric fields at ranges of up to 2 kV at an elevated temperature of around 250 C using hotplate.The performance of each of the lead free thick film piezoelectric ceramic was evaluated based on its charge coefficients,voltages output,and power output.The parameters of the film were varied with different screen printing process,co-firing duration and controlled temperature rate to determine the optimum lead-free piezoelectric ceramics.The result shows that the piezoelectric charge coefficient of KNN is 38 pC/N for a thickness of 140 μm which is able to generate a maximum power of 12.25 nW at external resistive load of 25 kΩ which is better performed compared to BaTiO3 with d33 of 25 pC/N and maximum output power of 0.423 nW for the similar thickness and external resistive load.In conclusion from this experimental result,it shows that KNN thick film performs better compared to BaTiO3 thick film as an energy harvesting material. 2017 Thesis http://eprints.utem.edu.my/id/eprint/23291/ http://eprints.utem.edu.my/id/eprint/23291/1/Fabrication%20Of%20Lead%20Free%20Piezoelectric%20Ceramics%20For%20Energy%20Harvesting%20Applications.pdf text en public http://eprints.utem.edu.my/id/eprint/23291/2/Fabrication%20Of%20Lead%20Free%20Piezoelectric%20Ceramics%20For%20Energy%20Harvesting%20Applications.pdf text en validuser https://plh.utem.edu.my/cgi-bin/koha/opac-detail.pl?biblionumber=112725 mphil masters UTeM Faculty Of Electronic And Computer Engineering 1. Akedo, J., 2010. Aerosol techniques for manufacturing piezoelectric materials, in Advanced Piezoelectric Material, pp. 493.538. 2. Ali, A. I., Ahn, C. W. and Kim, Y. S., 2013. Enhancement of piezoelectric and ferroelectric properties of BaTiO3 ceramics by aluminum doping, Ceramics International. Elsevier, 39(6), pp. 6623.6629. 3. Alper Erturk, Daniel J. Inman, 2011. Piezoelectric Energy Harvesting, John Wiley & Sons. 4. Almusallam, A. et al., 2017. Flexible piezoelectric nano-composite films for kinetic energy harvesting from textiles, Nano Energy. Elsevier, 33 (December 2016), pp. 146.156. 5. Amouri,a. et al., 2014. Physical properties of new lead free (Na0.5Bi0.5)(1.x)BaxTi(1.x) (Fe0.5Nb0.5)xO3 ceramics, Ceramics International. Elsevier, 40(6), pp. 8219.8227. 6. Anton, S. R. and Sodano, H., 2007. A review of power harvesting using piezoelectric materials (2003.2006), Smart Materials and Structures, 16(3), pp. R1.R21. 7. Aoyagi, R., Bannno, S. and Maeda, M., 2014. Synthesis of A Sodium Niobate-based Lead-free Piezoelectric Ceramic Using A Submicron-sized NaNbO3 Powder, pp. 31.34. 8. B. Jaffe, W. R. Cook Jr., H. Jaffe, 1971. Piezoelectric Ceramics, Academic Press London and New York. 9. Bai, W. et al., 2012. Dielectric, ferroelectric, and piezoelectric properties of textured BZT.BCT lead-free thick film by screen printing, Materials Letters. Elsevier B.V., 83, pp. 20.22. 10. Bai, W. et al., 2013. Dielectric properties and relaxor behavior of high Curie temperature (Ba0.85Ca0.15)(Zr0.1Ti0.9)O3.Bi(Mg0.5Ti0.5)O3 Lead-free ceramics, Ceramics International. Elsevier, 39, pp. S19.S23. 11. Bao, D. Q. et al., 2008. Characterization of PZT ferroelectric thin films prepared by a modified sol-gel mothed, 2008 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications, SPAWDA 2008, pp. 161.165. 12. Bowen, C. R. et al., 2014. Piezoelectric and ferroelectric materials and structures for energy harvesting applications, Energy & Environmental Science, 7(1), p. 25. 13. Byeon, S. and Yoo, J., 2014. Dielectric, piezoelectric properties and temperature stability in modified (Na,K,Li)(Nb,Ta)O3 ceramics for piezoelectric energy harvesting device, Journal of Electroceramics, 33(3.4), pp. 202.207. 14. Cardoso, V. F. et al., 2010. Design and fabrication of piezoelectric microactuators based on ƒÀ-poly (vinylidene fluoride) films for microfluidic applications., Conference proceedings : Annual International Conference of the IEEE Engineering in Medicine and Biology Society. IEEE Engineering in Medicine and Biology Society, 2010, pp. 903.6. 15. Chen, H.-Y. et al., 2010. Poling effect and piezoelectric response in high-strain ferroelectric 0.70Pb(Mg1/3Nb2/3O3.0.30PbTiO3 crystal, Journal of Applied Physics, 108(4), p. 44101. 16. Chen, L. et al., 2013. Poling induced dielectric anomalies in a PZT ceramic, Ceramics International. Elsevier, 39(8), pp. 8941.8944. 17. Chen, T. et al., 2014. Enhanced piezoelectric coefficient of HfO2-modified (K0.44Na0.56)0.94 Li0.06(Nb0.94Sb0.06)O3 lead-free ceramics, Ceramics International, 40(2), pp. 3755.3759. 18. Chen, Z. S., Yang, Y. M. and Deng, G. Q., 2009. Analytical and experimental study on vibration energy harvesting behaviors of piezoelectric cantilevers with different geometries, 2009 International Conference on Sustainable Power Generation and Supply, pp. 1.6. 19. Cheng, R. et al., 2015. Microstructure, electrical properties of Bi2NiMnO6-doped 0.935(Bi1/2Na1/2) TiO3.0.065BaTiO3 lead-free piezoelectric ceramics, Journal of Alloys and Compounds, 632, pp. 580.584. 20. Cheng, X. et al., 2014. Dielectric, ferroelectric, and piezoelectric properties in potassium sodium niobate ceramics with rhombohedral-orthorhombic and orthorhombic-tetragonal phase boundaries, Ceramics International. Elsevier, 40(4), pp. 5771.5779. 21. Choi, C. H. et al., 2013. Relation between piezoelectric properties of ceramics and output power density of energy harvester, Journal of the European Ceramic Society. Elsevier Ltd, 33(7), pp. 1343.1347. 22. Chou, C.-S. et al., 2010. The optimum conditions for preparing the lead-free piezoelectric ceramic of Bi0.5Na0.5TiO3 using the Taguchi method, Powder Technology. Elsevier B.V., 199(3), pp. 264.271. 23. Chou, C.-S. et al., 2011. Preparation and characterization of the lead-free piezoelectric ceramic of Bi0.5Na0.5TiO3 doped with CuO, Powder Technology. Elsevier B.V., 210(3), pp. 212.219. 24. Cui, Y. et al., 2012. Lead-free (Ba0.85Ca0.15)(Ti0.9Zr0.1)O3.CeO2 ceramics with high piezoelectric coefficient obtained by low-temperature sintering, Ceramics International. Elsevier Ltd and Techna Group S.r.l., 38(6), pp. 4761.4764. 25. Dabra, N. et al., 2009. Preparation and Characterization of the Ferroelectric Potassium Nitrate : Poly(vinyl alcohol) Composite Films, 56(8), pp. 1627.1633. 26. Damjanovic, D. et al., 2000. From ferroelectric ceramics and single crystals to thick and thin films: how domain-wall processes control the piezoelectric and dielectric properties, ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on Applications of Ferroelectrics (IEEE Cat. No.00CH37076), 1, pp. 305.310. 27. Daniels, A., Zhu, M. and Tiwari, A., 2013. Evaluation of piezoelectric material properties for a higher power output from energy harvesters with insight into material selection using a coupled piezoelectric-circuit-finite element method. IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 60(12), pp. 2626.33. 28. Dietze, M. and Es-Souni, M., 2008. Structural and functional properties of screen-printed PZT-PVDF-TrFE composites, Sensors and Actuators, A: Physical, 143(2), pp. 329.334. 29. Dodds, J. S., Meyers, F. N. and Loh, K. J., 2012. Piezoelectric characterization of PVDF-TrFE thin films enhanced with ZnO nanoparticles, IEEE Sensors Journal, 12(6), pp. 1889.1890. 30. Fang, B. et al., 2013. Improving ferroelectric and piezoelectric properties of PbFe1/4Sc1/4Nb1/2O3 ceramics by oxide doping prepared via a B-site oxide mixing route, Ceramics International. Elsevier, 39(2), pp. 1677.1681. 31. Farooq, M. U. and Fisher, J. G., 2014. Growth of (K0.5Na0.5)NbO3.SrTiO3 lead-free piezoelectric single crystals by the solid state crystal growth method and their characterization, Ceramics International. Elsevier, 40(2), pp. 3199.3207. 32. Feizpour, M. et al., 2014. Microwave-assisted synthesis and sintering of potassium sodium niobate lead-free piezoelectric ceramics, Ceramics International. Elsevier, 40(1 PART A), pp. 871.877. 33. Feng, Z. et al., 2013. Large piezoelectric effect in lead-free Ba(Zr0.2Ti0.8)O3-(Ba0.7Ca0.3)TiO3 films prepared by screen printing with solution infiltration process, Thin Solid Films. Elsevier B.V., 527, pp. 110.113. 34. Fu, F. et al., 2014. Electric properties of BaTiO3 lead-free textured piezoelectric thick film by screen printing method, Journal of Electroceramics, 33, pp. 208.213. 35. Gao, C., Huang, X. and Zhu, Z., 2012. Influence of barium content on the properties and structure of low temperature sintered BCZT lead-free piezoelectric ceramics, 2012 Symposium on Piezoelectricity, Acoustic Waves, and Device Applications (SPAWDA). Ieee, 3, pp. 219.222. 36. Gao, F. et al., 2011. Phase transition and piezoelectric properties of K0.48Na0.52NbO3.LiTa0.5Nb0.5O3.NaNbO3 lead-free ceramics, Journal of Alloys and Compounds, 509(20), pp. 6049.6055. 37. Gebhardt, S., Partsch, U. and Schonecker, 2008. PZT thick films for MEMS, IEEE International Symposium on Applications of Ferroelectrics, 2, pp. 3.4. 38. Gu, H. et al., 2012. Synthesis of (K, Na) (Nb, Ta)O3 lead-free piezoelectric ceramic powders by high temperature mixing method under hydrothermal conditions, Ceramics International. Elsevier Ltd and Techna Group S.r.l., 38(3), pp. 1807.1813. 39. Gurdal, E. a. et al., 2013. High power characterization of (Na0.5K0.5)NbO3 based lead-free piezoelectric ceramics, Sensors and Actuators A: Physical. Elsevier B.V., 200, pp. 44.46. 40. Gwirc, S. N., Negreira, C. a and Marino, N. R., 2010. Ultrasonic array of thick film transducers for biological tissue characterization. Conference proceedings : Annual International Conference of the IEEE Engineering in Medicine and Biology Society. IEEE Engineering in Medicine and Biology Society, 2010, pp. 186.9. 41. Ha, J.-Y. and Choi, J.-W., 2014. Improved piezoelectric properties of lead-free (1.x)(Na0.5K0.5)NbO3.x(Ba0.95Sr0.05)TiO3 ceramics by particle size control, Ceramics International. Elsevier, pp. 1.6. 42. Hansen, K., Astafiev, K. and Zawada, T., 2009. Lead-free piezoelectric thick films based on potassium sodium niobate solutions, 2009 IEEE International Ultrasonics Symposium. Ieee, pp. 1738.1741. 43. Hao, X. et al., 2014. A comprehensive review on the progress of lead zirconate-based antiferroelectric materials, Progress in Materials Science. Elsevier Ltd, 63 (October 2013), pp. 1.57. 44. Heinonen, E., Juuti, J. and Jantunen, H., 2007. Characteristics of piezoelectric cantilevers embedded in LTCC, Journal of the European Ceramic Society, 27(13.15), pp. 4135.4138. 45. Hindrichsen, C. C. et al., 2006. MEMS accelerometer with screen printed piezoelectric thick film, Proceedings of IEEE Sensors, pp. 1477.1480. 46. Hu, D. et al., 2014. Fabrication of [100]-oriented bismuth sodium titanate ceramics with small grain size and high density for piezoelectric materials, Journal of the European Ceramic Society. Elsevier Ltd, 34(5), pp. 1169.1180. 47. Hu, J., Jong, J. and Zhao, C., 2010. Vibration energy harvesting based on integrated piezoelectric components operating in different modes. IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 57(2), pp. 386.394. 48. Hu, S. Di, Chuang, K. C. and Tzou, H. Sen, 2010. PVDF energy harvester on flexible rings, Proceedings of the 2010 Symposium on Piezoelectricity, Acoustic Waves and Device Applications, SPAWDA10, 1, pp. 100.105. 49. Huang, X. Y., Gao, C. H. and Chen, Z. G., 2011. Influence of calcined temperature and sintered technology on the properties of NBT-KBT-BT lead-free piezoelectric ceramics, Proceedings of the 2011 Symposium on Piezoelectricity, Acoustic Waves and Device Applications, SPAWDA 2011, pp. 146.149. 50. Huang, Z. et al., 2006. Comparative measurements of piezoelectric coefficient of PZT films by berlincourt, interferometer, and vibrometer methods, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 53(12), pp. 2287.2292. 51. Hyungsuck Cho, 2005. Optomechatronics: Fusion of Optical and Mechatronic Engineering, CRC Press. 52. Hyunchang, S., 2010. Piezoelectric Coefficient Measurement of AlN Thin Films at the Nanometer Scale using Piezoresponse Force Microscopy, Journal of the Korean Physical Society, 56(2), p. 580. 53. Jaitanong, N. et al., 2014. Piezoelectric properties of cement based/PVDF/PZT composites, Materials Letters, 130, pp. 146.149. 54. Jang, L.-S. and Kuo, K.-C., 2007. Fabrication and Characterization of PZT Thick Films for Sensing and Actuation, Sensors, 7(4), pp. 493.507. 55. Jeong, D. Y. et al., 2007. Analysis of inhomogeneous stress distribution in the piezoelectric ceramics of unimorph cantilever for energy harvesting, IEEE International Symposium on Applications of Ferroelectrics, pp. 790.791. 56. Jiang, M. et al., 2012. Structure and piezoelectric properties of (1.x)K0.5Na0.5NbO3.xLiBiO3 lead-free piezoelectric ceramics, Transactions of Nonferrous Metals Society of China. The Nonferrous Metals Society of China, 22, pp. s133.s137. 57. Jiang, Y. et al., 2014. Lead-Free Piezoelectric Materials and Composites for High Frequency Medical Ultrasound Transducer Applications, pp. 903.906. 58. Jordan, T. L. and Langley, N., 2001. Piezoelectric Ceramics Characterization. 59. Juuti, J. a et al., 2006. Manufacturing of prestressed piezoelectric unimorphs using a postfired biasing layer. IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 53(5), pp. 838.46. 60. Kawada, S. et al., 2011. Study of nickel inner electrode lead-free piezoelectric ceramics, 2011 International Symposium on Applications of Ferroelectrics and 2011 International Symposium on Piezoresponse Force Microscopy and Nanoscale Phenomena in Polar Materials, ISAF/PFM 2011, 3, pp. 0.4. 61. Kerman, K. et al., 2008. Lead Free (K,Na)NbO3-based Piezoelectric Ceramics and Transducers, pp. 3.5. 62. Kim, D.-J. et al., 2008. Thickness dependence of submicron thick Pb(Zr0.3Ti0.7)O3 films on piezoelectric properties, Ceramics International, 34(8), pp. 1909.1915. 63. Kim, H., 2008. Design and Fabrication of Piezoelectric Micro Generator using Laser Micromachining and MEMS Technique, (August). 64. Kim, H. et al., 2008. Laser-machined piezoelectric cantilevers for mechanical energy harvesting, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 55(9), pp. 1900.1905. 65. Kim, H. S., Kim, J. H. and Kim, J., 2011. A review of piezoelectric energy harvesting based on vibration, International Journal of Precision Engineering and Manufacturing, 12(6), pp. 1129.1141. 66. Kim, K.-B. et al., 2013. Performance of unimorph cantilever generator using Cr/Nb doped Pb(Zr0.54Ti0.46)O3 thick film for energy harvesting device applications, Journal of the European Ceramic Society. Elsevier Ltd, 33(2), pp. 305.311. 67. Kim, S. H. et al., 2006. Application of Ag-ceramic composite electrodes to low firing piezoelectric multilayer ceramic actuators, Proceeding - The 1st International Forum On Strategic Technology 'e-Vehicle Technology', IFOST 2006, pp. 182.185. 68. Kok, S. L., 2011. Energy Harvesting Technologies : Thick-film Piezoelectric Microgenerator, in Sustainable Energy Harvesting Technology - Past, Present and Future. www.intechopen.com, pp. 191.214. 69. Kok, S. L., White, N. M. and Harris, N. R., 2009. Free-Standing Pb(Zr, Ti)O3 Thick-Films Prepared By a One-Step Air Co-Firing Technique. 70. Kok, S., Qumrul, A. and Chang, S., 2012. Thick-Film Based Piezoelectric Material Lead Zirconate Titanate ( PZT ) Performance Measurement Using Berlincourt Method, 1(c). 71. Kotera, H. et al., 2012. Micro fabrication of lead-free (K,Na)NbO3 piezoelectric thin films by dry etching, Micro & Nano Letters, 7(12), pp. 1223.1225. 72. Kumar, A. et al., 2014. Finite element analysis of vibration energy harvesting using lead-free piezoelectric materials: A comparative study, Journal of Asian Ceramic Societies. Taibah University, pp. 1.6. 73. Kurokawa, F. et al., 2013. Microfabrication of Lead-Free (K, Na) NbO3 Piezoelectric Thin Films by Dry Etching, Tranducers, (June), pp. 1051.1054. 74. Kwon, S. et al., 2007. Bulk and Thick Film Processing of Non-Lead Piezoelectric Material, 2007 Sixteenth IEEE International Symposium on the Applications of Ferroelectrics. Ieee, 3, pp. 634.637. 75. Kwon, S., Darsono, N. and Yoon, D., 2006. Optimization of Barium Titanate Slip for Tape Casting Using Design of Experiments, Journal of the Korean Ceramic Society, 43(9), pp. 519.526. 76. Lee, D.-Y. et al., 2011. Optimal materials and process conditions of functional layers for piezoelectric MEMS process at high temperature, Micro & Nano Letters, 6(7), p. 553. 77. Lee, S. B. et al., 2013. Microstructure design of lead-free piezoelectric ceramics, Journal of the European Ceramic Society. Elsevier Ltd, 33(2), pp. 313.326. 78. Leontsev, S. O. and Eitel, R. E., 2010. Progress in engineering high strain lead-free piezoelectric ceramics, Science and Technology of Advanced Materials, 11(4), p. 44302. 79. Levassort, F. et al., 2011. High frequency single element transducer based on pad-printed lead-free piezoelectric thick films, IEEE International Ultrasonics Symposium Proceedings, pp. 848.851. 80. Li, C. et al., 2013. Effects of sintering temperature and poling conditions on the electrical, Ceramics International. Elsevier, 39(3), pp. 2967.2973. 81. Li, C.-X. et al., 2013. Effects of sintering temperature and poling conditions on the electrical properties of Ba0.70Ca0.30TiO3 diphasic piezoelectric ceramics, Ceramics International. Elsevier, 39(3), pp. 2967.2973. 82. Li, H. et al., 2014. Good temperature stability and high piezoelectric properties of pure and La-doped tetragonal (K0.45Na0.55)0.94Li0.06ETaxNb1-xO3 ceramics, Journal of the European Ceramic Society. Elsevier Ltd, pp. 1.8. 83. Li, L. et al., 2015. The preparation and piezoelectric property of textured KNN-based ceramics with plate-like NaNbO3 powders as template, Journal of Alloys and Compounds. Elsevier B.V., 622, pp. 137.142. 84. Li, T. and Gianchandani, Y. B., 2006. A micromachining process for die-scale pattern transfer in ceramics and its application to bulk piezoelectric actuators, Journal of Microelectromechanical Systems, 15(3), pp. 605.612. 85. Li, W. et al., 2011. High piezoelectric d33 coefficient of lead-free (Ba0.93Ca0.07) (Ti0.95Zr0.05)O3 ceramics sintered at optimal temperature, Materials Science and Engineering: B. Elsevier B.V., 176(1), pp. 65.67. 86. Li, Y. et al., 2012. Textured (K0.5Na0.5)NbO3 ceramics prepared by screen-printing multilayer grain growth technique, Ceramics International. Elsevier Ltd and Techna Group S.r.l., 38, pp. S283.S286. 87. Li, Y.-L. et al., 2012. Enhanced Ferroelectric and Piezoelectric Properties of Textured K0.45Na0.55NbO3 Ceramics Prepared by Screen-printing Technique, Journal of Inorganic Materials, 27(2), pp. 214.218. 88. Lin, D. et al., 2013. Microstructure, ferroelectric and piezoelectric properties of Bi0.5K0.5TiO3-modified BiFeO3-BaTiO3 lead-free ceramics with high Curie temperature, Journal of the European Ceramic Society. Elsevier Ltd, 33(15.16), pp. 3023.3036. 89. Lin, D., Kwok, K. W. and Chan, H. L. W., 2014. Structure , ferroelectric , piezoelectric and ferromagnetic properties of BiFeO3.Ba0.85Ca0.15Ti0.90Zr0.10O3 lead-free multiferroic ceramics, Ceramics International. Elsevier, 40(1), pp. 1335.1339. 90. Lin, K.-R. et al., 2013. Re-poling process for piezoelectric-based multilayer ceramic capacitors force sensor, Applied Physics Letters, 102(14), p. 142904. 91. Liu, C. et al., 2014. 0.99(K0.45Na0.52Li0.03)(Nb1.xSbx)O3.0.01BiScO3 lead-free ceramics with excellent piezoelectric properties and broad sintering temperature, Ceramics International. Elsevier, 40(5), pp. 7589.7593. 92. Lou-Moeller, R. et al., 2007. Screen-printed piezoceramic thick films for miniaturised devices, Journal of Electroceramics, 19(4), pp. 333.338. 93. Lumentut, M. F. and Howard, I. M., 2013. Analytical and experimental comparisons of electromechanical vibration response of a piezoelectric bimorph beam for power harvesting, Mechanical Systems and Signal Processing. Elsevier, 36(1), pp. 66.86. 94. Luniak, M. and Wolter, K. J., 2013. Polymer thick film technology and its capability for medicine and sensor applications, Proceedings of the International Spring Seminar on Electronics Technology, pp. 70.73. 95. Luo, B. C. et al., 2013. Growth and characterization of lead-free piezoelectric BaZr0.2Ti0.8O3.Ba0.7Ca0.3TiO3 thin films on Si substrates, Applied Surface Science, 270, pp. 377.381. 96. Ma, J. et al., 2014. Enhancement of the dielectric, piezoelectric, and ferroelectric properties in BiYbO3-modified (Ba0.85Ca0.15)(Ti0.9Zr0.1)O3 lead-free ceramics, Ceramics International, 40(2), pp. 2979.2984. 97. Ma, X. et al., 2014. Effect of Eu doping on structure and electrical properties of lead-free (Bi0.5Na0.5)0.94Ba0.06TiO3 ceramics, Ceramics International. Elsevier, 40(5), pp. 7007.7013. 98. Maqbool, A. et al., 2014. Enhanced electric field-induced strain and ferroelectric behavior of (Bi0.5Na0.5)TiO3-BaTiO3-SrZrO3 lead-free ceramics, Ceramics International, 40(8 PART A), pp. 11905.11914. 99. Markys G. Cain, 2014. Characterisation of Ferroelectric Bulk Materials and Thin Films, Springer. 100. Mills, D. M. and Smith, S. W., 2002. Multi-layered PZT/polymer composites to increase signal-to-noise ratio and resolution for medical ultrasound transducers part II: Thick film technology, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 49(7), pp. 1005.1014. 101. Minase, J. et al., 2010. A review, supported by experimental results, of voltage, charge and capacitor insertion method for driving piezoelectric actuators, Precision Engineering, 34(4), pp. 692.700. 102. Naghib-Zadeh, H. et al., 2011. Low temperature sintering of barium titanate based ceramics with high dielectric constant for LTCC applications, Journal of the European Ceramic Society. Elsevier Ltd, 31(4), pp. 589.596. 103. Nakao, T. et al., 2013. Fabrication of lead-free ferroelectric (Na,K)NbO3 thin films by Pulsed Laser Deposition, pp. 93.95. 104. Nath, R. et al., 2008. Enhanced piezoelectric response from barium strontium titanate multilayer films, Applied Physics Letters, 92(1), p. 12916. 105. Papakostas, T. V. and White, N. M., 2001. Polymer thick-films on silicon: A route to hybrid microsystems, IEEE Transactions on Components and Packaging Technologies, 24(1), pp. 67.75. 106. Park, G. T. et al., 2002. Measurement of piezoelectric coefficients of lead zirconate titanate thin films by strain-monitoring pneumatic loading method, Applied Physics Letters, 80(24), pp. 4606.4608. 107. Park, J. H. and Park, H.-H., 2011. In situ method of densification for powder-based piezoelectric thick films for microelectromechanical system applications, Micro & Nano Letters, 6(9), p. 749. 108. Park, K.-I. et al., 2010. Piezoelectric BaTiO3 thin film nanogenerator on plastic substrates. Nano letters, 10(12), pp. 4939.43. 109. Pavli., J., Mali., B. and Rojac, T., 2014. Microstructural, structural, dielectric and piezoelectric properties of potassium sodium niobate thick films, Journal of the European Ceramic Society, 34(2), pp. 285.295. 110. Phillips, J., 2008. Piezoelectric technology primer, CTS Wireless Components. 111. Priya, S. & Nahm, S., 2013. Lead-free Piezoelectrics, Springer. 112. Puli, V. S. et al., 2014. Investigations on structure, ferroelectric, piezoelectric and energy storage properties of barium calcium titanate (BCT) ceramics, Journal of Alloys and Compounds. Elsevier B.V., 584, pp. 369.373. 113. Qi, J. Q. et al., 2014. Direct synthesis of barium zirconate titanate (BZT) nanoparticles at room temperature and sintering of their ceramics at low temperature, Ceramics International. Elsevier, 40(2), pp. 2747.2750. 114. Qin, L. et al., 2012. Fabrication and characterization of thick-film piezoelectric lead zirconate titanate ceramic resonators by tape-casting, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 59(12), pp. 2803.2812. 115. Qin, L., 2013. Characterization of Thick Film Piezoelectric Lead Zirconate Titanate (PZT) Ceramics Fabricated By Tape Casting Processing, 2013 Joint UFFC, EFTF and PFM Symposium, pp. 1097.1100. 116. Rachakom, A., Jiansirisomboon, S. and Watcharapasorn, A., 2014. Effect of poling on piezoelectric and ferroelectric properties of Bi0.5Na0.5Ti1-xZrxO3 ceramics, Journal of Electroceramics, 33(1.2), pp. 105.110. 117. Rahman, J. U. et al., 2014. Field induced strain response of lead-free BaZrO3-modified Bi0.5Na0.5TiO3.BaTiO3 ceramics, Journal of Alloys and Compounds, 593, pp. 97.102. 118. Ratanapreechachai, P., Kanno, I. and Sato, M., 2012. Sputtering deposition of lead-free piezoelectric (K,Na)NbO3 thin films, International Conference on Emerging Trends in Engineering and Technology, ICETET, pp. 44.47. 119. Reinhardt, K. et al., 2010. Lead . Oxide . Free Copper Thick . Film Paste for Alumina Substrates. 120. Rianyoi, R. et al., 2013. Influence of barium titanate content and particle size on electromechanical coupling coefficient of lead-free piezoelectric ceramic-Portland cement composites, Ceramics International. Elsevier, 39, pp. S47.S51. 121. Rocha, J. G. et al., 2010. Energy harvesting from piezoelectric materials fully integrated in footwear, IEEE Transactions on Industrial Electronics, 57(3), pp. 813.819. 122. Ryu, J. et al., 2007. Sintering and piezoelectric properties of KNN ceramics doped with KZT. IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 54(12), pp. 2510.2515. 123. Safari, A. and Abazari, M., 2010. Lead-free piezoelectric ceramics and thin films, IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 57(10), pp. 2165.2176. 124. Safari, A. and Hejazi, M., 2012. Lead-Free Piezoelectrics, in Priya, S. and Nahm, S. (eds). New York, NY: Springer New York. 125. Saito, Y. et al., 2006. High Performance Lead-free Piezoelectric Material, R&D Review, 41(2), pp. 22.28. 126. Scaparo, J. and Kaya, T., 2012. Piezoelectric Energy Harvester Design and Fabrication, Proceeding of the ASEE North Central Section Conference. 127. Seok-Woo, Y. et al., 2011. Piezoelectric Aging Behavior of Lead-free 1-mol% Li2O-excess 0.9(Na0.52K0.48)NbO3-0.1LiTaO3 Multilayer Ceramic Actuators, Journal of the Korean Physical Society, 58(31), p. 590. 128. Seol, J.-H. et al., 2012. Piezoelectric and dielectric properties of (K0.44Na0.52Li0.04) (Nb0.86Ta0.10Sb0.04)O3.PVDF composites, Ceramics International. Elsevier Ltd and Techna Group S.r.l., 38, pp. S263.S266. 129. Serra, N. et al., 2009. Screen-printed polymer-based microfluidic and micromechanical devices based on evaporable compounds, 2009 European Microelectronics and Packaging Conference. 130. Serra, S. G. et al., 2007. Preliminary experiments for the fabrication of thermally actuated bimorph cantilever arrays on non-silicon wafers with vertical interconnects, 4M2007 Conference on Multi-Material Micro Manufacture. 131. Shan, X. et al., 2013. Bi(Zn1/2Ti1/2)O3 modified BiFeO3.BaTiO3 lead-free piezoelectric ceramics with high temperature stability, Ceramics International. Elsevier, 39(6), pp. 6707.6712. 132. Shepard, J. F. et al., 1999. Characterization and aging response of the d31 piezoelectric coefficient of lead zirconate titanate thin films, Journal of Applied Physics, 85(9), p. 6711. 133. Shi, L. et al., 2014. Piezoelectric properties of Fe2O3 doped BiYbO3-Pb(Zr,Ti)O3 high Curie temperature ceramics, Ceramics International. Elsevier, 40(8 PART A), pp. 11485.11491. 134. Simon, L. et al., 2002. Electromechanical characterization of thick PT and PZT films, pp. 459.462. 135. Skidmore, T. a et al., 2011. Phase Diagram and Structure-Property Relationships in the Lead-Free Piezoelectric System: Na0.5K0.5NbO3-LiTaO3, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 58(9), pp. 1819.1825. 136. Smith, M. B. et al., 2008. Crystal structure and the paraelectric-to-ferroelectric phase transition of nanoscale BaTiO3, Journal of the American Chemical Society, 130(22), pp. 6955.6963. 137. Stojanovic, B. D. et al., 2002. Barium titanate screen-printed thick films, Ceramics International, 28(3), pp. 293.298. 138. Stojanovic, B. D. et al., 2007. Screen printed PLZT thick films prepared from nanopowders, Journal of the European Ceramic Society, 27(13.15), pp. 4359.4362. 139. Suhaimizan, W. et al., 2006. Thick Film Paste Preparation and Characterization of BaTiO3 For Humidity Sensor , (September), pp. 4.5. 140. Takenaka, T. and Nagata, H., 2005. Current status and prospects of lead-free piezoelectric ceramics, Journal of the European Ceramic Society, 25(12 SPEC. ISS.), pp. 2693.2700. 141. Tang, G. et al., 2012. Fabrication and analysis of high-performance piezoelectric MEMS generators, Journal of Micromechanics and Microengineering, 22(6), p. 65017. 142. Tick, T. et al., 2008. Screen printed low-sintering-temperature barium strontium titanate (BST) thick films, Journal of the European Ceramic Society, 28(4), pp. 837.842. 143. Torah, R., Beeby, S. P. and White, N. M., 2005. An improved thick-film piezoelectric material by powder blending and enhanced processing parameters. IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 52(1), pp. 10.6. 144. Tsujiura, Y. et al., 2013. Lead-Free Piezoelectric Mems Energy Harvesters of Stainless Steel Cantilevers, (June), pp. 474.477. 145. Uchino, K. and Pennsylvania, T., 2010. Relaxor ferroelectric-based ceramics. 146. Very, F., Combette, P. and Coudouel, D., 2013. Piezoelectric thick film sensors : Fabrication and Characterization, 2013 Joint UFFC, EFTF and PFM Symposium, pp. 287.290. 147. Vijatovi., M. M. et al., 2010. Barium titanate thick films prepared by screen printing technique, Processing and Application of Ceramics, 4(2), pp. 53.58. 148. Vijatovic, M. M., Bobic, J. D. and Stojanovic, B. D., 2008a. History and challenges of barium titanate: Part I, Science of Sintering, 40(2), pp. 155.165. 149. Vijatovic, M. M., Bobic, J. D. and Stojanovic, B. D., 2008b. History and challenges of barium titanate: Part II, Science of Sintering, 40(3), pp. 235.244. 150. Wang, H. et al., 2014. New phase boundary and piezoelectric properties in (K,Na)NbO3 based ceramics, Journal of Alloys and Compounds. Elsevier B.V., 585, pp. 748.752. 151. Wang, L. et al., 2014. Effects of thickness on structures and electrical properties of Mn-doped K0.5Na0.5NbO3 films, Journal of Alloys and Compounds. Elsevier Ltd and Techna Group S.r.l., 582, pp. 759.763. 152. Wang, N. et al., 2012. Fabrication of High-aspect-ratio PZT Structure by Nanocomposite Sol-gel Method for Laterally-driven Piezoelectric MEMS Switch, Micro-electromechanical Systems, pp. 247.252. 153. Wang, X. Y. et al., 2006. Microfabrication process of PZT thick film by aerosol deposition method, Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS, pp. 1288.1291. 154. Wang, Y. et al., 2014. High energy-storage properties of [(Bi1/2Na1/2)0.94 Ba0.06] La(1-x) ZrxTiO3 lead-free anti-ferroelectric ceramics, Ceramics International. Elsevier, 40(3), pp. 4323.4326. 155. Wang, Z., Cheeke, J. D. N, 1999. Characterizing Unpoled Piezoelectric Ceramic Film by Lamb-Waves, IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 46(5), pp. 1094.1100. 156. Wei, Y. et al., 2013. A screen printable sacrificial fabrication process to realise a cantilever on fabric using a piezoelectric layer to detect motion for wearable applications, Sensors and Actuators, A: Physical. Elsevier B.V., 203, pp. 241.248. 157. Wolf, R. a. and Trolier-McKinstry, S., 2004. Temperature dependence of the piezoelectric response in lead zirconate titanate films, Journal of Applied Physics, 95(3), pp. 1397.1406. 158. Wu, L. et al., 2008. Good temperature stability of K0.5Na0.5NbO3 based lead-free ceramics and their applications in buzzers, Journal of the European Ceramic Society, 28(15), pp. 2963.2968. 159. Wu, M. et al., 2011. Enhanced electrical properties of textured NBBT ceramics derived from the screen printing technique. IEEE Transactions on Ultrasonics, Ferroelectrics and Frequency Control, 58(10), pp. 2036.41. 160. Wu, T. et al., 2014. Microstructures and dielectric properties of Ba0.4Sr0.6TiO3 ceramics with BaO-TiO2-SiO2 glass-ceramics addition, Journal of Alloys and Compounds, 584, pp. 461.465. 161. Xu, R. et al., 2011. Screen Printed PZT Thick Film Bimorph Mems Cantilever Device For Vibration Energy Harvesting, pp. 679.682. 162. Yan, C. et al., 2012. Fabrication and characterisation of piezoelectric microcantilever probe, Micro & Nano Letters, 7(4), p. 306. 163. Yang, J. L., Chen, H. Y. and Wang, Z., 2010. Synthesis of sodium-potassium niobate (K, Na)NbO3 lead-free piezoelectric powders using solvothermal and hydrothermal processing, Proceedings of the 2010 Symposium on Piezoelectricity, Acoustic Waves and Device Applications, SPAWDA10, pp. 249.253. 164. Yin, Q. et al., 2015. Structure and electrical properties of K0.5Na0.5Nb0.94.xSb0.06SnxO3 lead-free piezoelectric ceramics, Journal of Alloys and Compounds. Elsevier B.V., 622, pp. 132.136. 165. Yu, H. et al., 2014. A vibration-based MEMS piezoelectric energy harvester and power conditioning circuit, Sensors (Switzerland), 14(2), pp. 3323.3341. 166. Zang, J. et al., 2014. Bi1/2Na1/2TiO3-BaTiO3 based thick-film capacitors for high-temperature applications, Journal of the European Ceramic Society. Elsevier Ltd, 34(1), pp. 37.43. 167. Zarnik, M. S., Ur.i., H. and Kosec, M., 2011. Recent Progress In Thick-Film Piezoelectric Actuators Prepared By Screen-Printing, Piezoelectric actuators, pp. 1.27. 168. Zhang, B. et al., 2012. Effects of sintering temperature and poling conditions on the electrical properties of Bi0.50(Na0.70K0.20Li0.10)0.50TiO3 piezoelectric ceramics, Journal of Alloys and Compounds, 525, pp. 53.57. 169. Zhang, H. et al., 2010. Low temperature preparation and electrical properties of sodium.potassium bismuth titanate lead-free piezoelectric thick films by screen printing, Journal of the European Ceramic Society. Elsevier Ltd, 30(15), pp. 3157.3165. 170. Zhang, J. et al., 2014. Structural, dielectric and piezoelectric properties of xBiFeO3.(1.x)BaTi0.9Zr0.1O3 ceramics, Ceramics International, 40(4), pp. 5173.5179. 171. Zhang, L. and Hao, X., 2014. Dielectric properties and energy-storage performances of (1.x)(Na0.5Bi0.5)TiO3.xSrTiO3 thick films prepared by screen printing technique, Journal of Alloys and Compounds. Elsevier B.V., 586, pp. 674.678. 172. Zhang, Q. et al., 2017. Achieving both high d33 and high TC in low-temperature sintering Pb(Ni1/3Nb2/3)O3.Pb(Mg1/2W1/2)O3.Pb(Zr0.5Ti0.5)O3 ceramics using Li2CO3, Materials Research Bulletin. Elsevier Ltd, 85, pp. 96.103. 173. Zhang, S. et al., 2009. Characterization of hard piezoelectric lead-free ceramics. IEEE transactions on ultrasonics, ferroelectrics, and frequency control, 56(8), pp. 1523.7. 174. Zhang, S.-T., Yan, F. and Yang, B., 2010. Morphotropic phase boundary and electrical properties in (1.x)Bi0.5Na0.5TiO3.xBi(Zn0.5Ti0.5)O3 lead-free piezoceramics, Journal of Applied Physics, 107(11), p. 114110. 175. Zhang, Y., Baot, D. and Guo, H., 2009. Growth and Characterization of PZT Thin Films with A Pt / Ti Layer on Silicon Substrate, 2009 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, pp. 915.918. 176. Zhao, J.-Q. et al., 2013. Preparation, characterisation, and electrical properties of (K0.5Na0.5)NbO3 lead-free piezoelectric ceramics, Journal of Electroceramics, 32(2.3), pp. 255.259. 177. Zhao, Y. et al., 2012. Poling field dependence of ferroelectric domains in tetragonal KNNLN ceramics, Ceramics International. Elsevier Ltd and Techna Group S.r.l., 38(7), pp. 6067.6070. 178. Zheng, T. et al., 2015. Giant d33 in nonstoichiometric (K,Na)NbO3-based lead-free ceramics, Scripta Materialia. Acta Materialia Inc., 94, pp. 25.27.

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