An investigation of physical processes in nanosphere lithography

An investigation of physical processes in nanosphere lithography

Various physical processes have been investigated in order to improve the Nanosphere Lithography (NSL) technique by modifying the nanosphere structures. Polysytrene CPS) nanospheres used in NSL can be modified in three schemes: Electron beam, heat and chemical manipulation techniques. The most...

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書目詳細資料
主要作者:	Agam, Mohd Arif
格式:	Thesis
語言:	English
出版:	2006
主題:	TA Engineering (General) Civil engineering (General)
在線閱讀:	http://eprints.uthm.edu.my/7348/1/24p%20MOHD%20ARIF%20AGAM.pdf
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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