An investigation of physical processes in nanosphere lithography

Various physical processes have been investigated in order to improve the Nanosphere Lithography (NSL) technique by modifying the nanosphere structures. Polysytrene CPS) nanospheres used in NSL can be modified in three schemes: Electron beam, heat and chemical manipulation techniques. The most...

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主要作者: Agam, Mohd Arif
格式: Thesis
语言:English
出版: 2006
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在线阅读:http://eprints.uthm.edu.my/7348/1/24p%20MOHD%20ARIF%20AGAM.pdf
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