Fabrication, characterization and optimization of in-house MOSFET transistor using spin on dopant technique
This thesis explains the development and fabrication of first in-house MOSFET device using spin -on dopant technique at KUKUM Microfahrication Cleanroom. The process started with the establishment of process flow, process modules, and process parameters. Four modules were developed. The charac...
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Main Author: | Morsin, Marlia |
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Format: | Thesis |
Language: | English English English |
Published: |
2004
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Subjects: | |
Online Access: | http://eprints.uthm.edu.my/7661/1/24p%20MARLIA%20MORSIN.pdf http://eprints.uthm.edu.my/7661/2/MARLIA%20MORSIN%20COPYRIGHT%20DECLARATION.pdf http://eprints.uthm.edu.my/7661/3/MARLIA%20MORSIN%20WATERMARK.pdf |
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