Fabrication and characterization of silicon nitride thin film planar waveguides produced by RF magnetron sputtering technique
Silicon nitride based planar waveguides play an important role in biosensing applications. Conventional fabrication of silicon nitride waveguides utilizes the chemical vapor deposition (CVD) technologies. Silicon nitride waveguide abrication through magnetron sputtering is still unexplored and a few...
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| Format: | Thesis |
| Language: | English English English |
| Published: |
2016
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| Online Access: | http://eprints.uthm.edu.my/812/1/24p%20UZAIR%20MAJEED.pdf http://eprints.uthm.edu.my/812/2/UZAIR%20MAJEED%20COPYRIGHT%20DECLARATION.pdf http://eprints.uthm.edu.my/812/3/UZAIR%20MAJEED%20WATERMARK.pdf |
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