Azali, M. M. (2022). Comparison of the structural properties of silicon carbide using very high frequency plasma enhanced chemical vapour deposition with magnetron sputtering techniques.
Chicago Style (17th ed.) CitationAzali, Muhamad Muizzudin. Comparison of the Structural Properties of Silicon Carbide Using Very High Frequency Plasma Enhanced Chemical Vapour Deposition with Magnetron Sputtering Techniques. 2022.
MLA引文Azali, Muhamad Muizzudin. Comparison of the Structural Properties of Silicon Carbide Using Very High Frequency Plasma Enhanced Chemical Vapour Deposition with Magnetron Sputtering Techniques. 2022.
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