Comparison of the structural properties of silicon carbide using very high frequency plasma enhanced chemical vapour deposition with magnetron sputtering techniques

Comparison of the structural properties of silicon carbide using very high frequency plasma enhanced chemical vapour deposition with magnetron sputtering techniques

In this study, the feasibility of using very high frequency (100 MHz to 200 MHz) Plasma Enhanced Chemical Vapour Deposition (VHF-PECVD) technique to deposit crystalline silicon carbide (SiC) thin films was investigated. High quality crystalline SiC film is very challenging to be produced since high...

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书目详细资料
主要作者:	Azali, Muhamad Muizzudin
格式:	Thesis
语言:	English
出版:	2022
主题:	QC Physics
在线阅读:	http://eprints.utm.my/id/eprint/101996/1/MuhamadMuizzudinAzaliMFS2022.pdf.pdf
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