Silicon self-assembled nanodots fabricated using a radio-frequency magnetron sputtering method
Silicon nanodot is a promising nanostructured material for future single-electron devices in nanoelectronic system. The self-assembly growth of silicon nanodots on sapphire substrate was investigated, with highlights on the very early stage of nucleation and the growth process. The scope of study co...
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| Format: | Thesis |
| Language: | English |
| Published: |
2008
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| Online Access: | http://eprints.utm.my/id/eprint/11349/1/LimQiaoJieMFS2008.pdf |
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