Conduction mechanisms in diamond-like carbon thin films prepared by PECVD method
The aim of this study is to prepare thin films of diamond-like carbon (a-C:H) and to determine the conduction mechanisms in the diamond-like carbon thin films. Diamond-like carbon (a-C:H) thin films were deposited on corning glass substrates using PECVD method. The samples were fabricated in Al/a-C:...
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| 格式: | Thesis |
| 语言: | English |
| 出版: |
2010
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| 主题: | |
| 在线阅读: | http://eprints.utm.my/id/eprint/16336/1/MohdAzamnieAbdMFSA2010.pdf |
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