Effect of different pretreatment parameters on silicon nitride substrate surface roughness prior to diamond deposition

High hardness, high strength to weight ratio, wear resistance, and low coefficient of thermal expansion properties have made silicon nitride ceramic to be one of the most applicable engineering materials for many applications including structural applications, military, refractory, energy production...

وصف كامل

محفوظ في:
التفاصيل البيبلوغرافية
المؤلف الرئيسي: Saaran, Idris
التنسيق: أطروحة
منشور في: 2010
الموضوعات:
الوسوم: إضافة وسم
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id my-utm-ep.16374
record_format uketd_dc
spelling my-utm-ep.163742017-08-20T03:57:50Z Effect of different pretreatment parameters on silicon nitride substrate surface roughness prior to diamond deposition 2010 Saaran, Idris TJ Mechanical engineering and machinery High hardness, high strength to weight ratio, wear resistance, and low coefficient of thermal expansion properties have made silicon nitride ceramic to be one of the most applicable engineering materials for many applications including structural applications, military, refractory, energy production, automotive and aerospace, and even biomechanical applications. These beneficial properties also attract many researchers to conduct studies on this advanced ceramic for several decades. One of them is surface pretreatment prior to diamond coating. This project presents the effect of pretreatment parameters on silicon nitride substrate prior to diamond deposition. Full factorial experimental design is used to plan and analyze the experimental trials. Two factors studied are chemical etchant concentration and etching time. Results from the experiments show that etchant concentrations and etching time play a significant role on substrate surface roughness. Empirical models which represent the relationship between chemical etching and surface roughness have successfully developed within acceptable accuracy. The confirmation tests show that surface roughness values are in between the predicted intervals. 2010 Thesis http://eprints.utm.my/id/eprint/16374/ masters Universiti Teknologi Malaysia, Faculty of Mechanical Engineering Faculty of Mechanical Engineering
institution Universiti Teknologi Malaysia
collection UTM Institutional Repository
topic TJ Mechanical engineering and machinery
spellingShingle TJ Mechanical engineering and machinery
Saaran, Idris
Effect of different pretreatment parameters on silicon nitride substrate surface roughness prior to diamond deposition
description High hardness, high strength to weight ratio, wear resistance, and low coefficient of thermal expansion properties have made silicon nitride ceramic to be one of the most applicable engineering materials for many applications including structural applications, military, refractory, energy production, automotive and aerospace, and even biomechanical applications. These beneficial properties also attract many researchers to conduct studies on this advanced ceramic for several decades. One of them is surface pretreatment prior to diamond coating. This project presents the effect of pretreatment parameters on silicon nitride substrate prior to diamond deposition. Full factorial experimental design is used to plan and analyze the experimental trials. Two factors studied are chemical etchant concentration and etching time. Results from the experiments show that etchant concentrations and etching time play a significant role on substrate surface roughness. Empirical models which represent the relationship between chemical etching and surface roughness have successfully developed within acceptable accuracy. The confirmation tests show that surface roughness values are in between the predicted intervals.
format Thesis
qualification_level Master's degree
author Saaran, Idris
author_facet Saaran, Idris
author_sort Saaran, Idris
title Effect of different pretreatment parameters on silicon nitride substrate surface roughness prior to diamond deposition
title_short Effect of different pretreatment parameters on silicon nitride substrate surface roughness prior to diamond deposition
title_full Effect of different pretreatment parameters on silicon nitride substrate surface roughness prior to diamond deposition
title_fullStr Effect of different pretreatment parameters on silicon nitride substrate surface roughness prior to diamond deposition
title_full_unstemmed Effect of different pretreatment parameters on silicon nitride substrate surface roughness prior to diamond deposition
title_sort effect of different pretreatment parameters on silicon nitride substrate surface roughness prior to diamond deposition
granting_institution Universiti Teknologi Malaysia, Faculty of Mechanical Engineering
granting_department Faculty of Mechanical Engineering
publishDate 2010
_version_ 1747815028125335552