UV-Vis characterization of diamond-like carbon thin films deposited using (DC-PECVD)

A study of optical properties of Diamond-like Carbon Thin Films deposited by DC-PECVD. The films was deposited on the corning with the ratio of Hydrogen, H2 (97%) and Methane, CH4 (3%). The temperatures were varied between 200°C to 600°C while maintaining other important variables such as DC voltage...

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Main Author:	Ab. Rahman, Nur Alifah
Format:	Thesis
Language:	English
Published:	2010
Subjects:	QC Physics
Online Access:	http://eprints.utm.my/id/eprint/16745/7/NurAlifahAbMFSA2010.pdf
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spelling	my-utm-ep.167452017-09-20T03:40:40Z UV-Vis characterization of diamond-like carbon thin films deposited using (DC-PECVD) 2010-11 Ab. Rahman, Nur Alifah QC Physics A study of optical properties of Diamond-like Carbon Thin Films deposited by DC-PECVD. The films was deposited on the corning with the ratio of Hydrogen, H2 (97%) and Methane, CH4 (3%). The temperatures were varied between 200°C to 600°C while maintaining other important variables such as DC voltage (1.5kV) and pressure (1 x 10-1 torr). From the light transmission using UV-Vis spectroscopy it was found that the type of optical transition is allowed indirect transition in the range of 3.8eV to 4.3eV. The ellipsometry is to determine the thickness, d. The thickness decreases with the increase of substrate deposition temperature. Photoluminescence properties were studied using photoluminescence spectrometer. The photoluminescence analysis was order to obtain the peak of excitation and emission range of the sample films. It has been found that the transition energy in the range of (3.06-3.22)eV. 2010-11 Thesis http://eprints.utm.my/id/eprint/16745/ http://eprints.utm.my/id/eprint/16745/7/NurAlifahAbMFSA2010.pdf application/pdf en public masters Universiti Teknologi Malaysia, Faculty of Science Faculty of Science Braga E.S (2000), Microelectronics Journal, 31, 251-254 Christopher Nebel and Juergen Ristein (2004). “Thin-Film Diamond II”. Volume 77, United Kingdom. Elsivier Inc. Damasceno J.C(2003), Thin Solid Films,433,199-204 Dresselhaus M.S, G.Dresselhaus,P.C Eklund (1996), Science of Fullerenes and Carbon Compund, 39 Fathallah M.A (2006), Journal of Non-Crystalline Solids, 352, 1388-1391 Grill A (1999), Thin Solid Films, Electrical And Optical Properties Of DLC, 355- 356, 189-193 Grill A., V. Patel (1994), Diamond Rel. Mater. 4, 62. Grill A., V. Patel (1992), Diamond Films Technology, 219. Jinlong Luo, Xuantong Ying, Peinan Wang, Liangyao Chen (2002), “Study on the growth of CVD diamond thin films by in situ reflectivity measurement”. Diamond and Related Materials 11, 1871-1875 Mednikarov B. (2005), Optical Properties of DLC and NCD Films, Vol 7 1407-1413 Micheal D.Lumb (1987), “Luminescence Spectroscopy”, Academic Press London. Nurul Nisa (2010), Study Of Optical Properties Hydrogenated Amorphous Carbon (a-C:H) Thin Film Prepared ByDc-Pecvd, UTM Paul W.May (2000). “Diamond Thin Films: a 21st-century material”. Phil. Trans. R. Soc Lond. A 358,473-495 Stiegler.J, Lang.T, M.Nygard-Ferguson, Y.von Kaenal, E. Blank (1996) , “Low temperature limits of diamond film growth by microwave plasma-assisted CVD”. Diamond and Related Materials 5 226-230 Tinchev S.S (2006), Optoelectronics and Advanced Materials, Vol.8, 308-311 Tomlin S.G (1972), Thin Solid Films, 265-268 William A.McGahan (1993), Thin Solid Films, 234, 443-446 Yin, Z Akkerman, B.X Yang, F.W. Smith (1997). “Optical Properties an Microstructure of CVD Diamond Films”. Diamond and Related Materials,153-158 Zhang G.F, V.Buck (2003). “A Simple method to grow textured (111) diamond thin films in a hot-filament CVD system”. Applied Surface Science 207 121-127
institution	Universiti Teknologi Malaysia
collection	UTM Institutional Repository
language	English
topic	QC Physics
spellingShingle	QC Physics Ab. Rahman, Nur Alifah UV-Vis characterization of diamond-like carbon thin films deposited using (DC-PECVD)
description	A study of optical properties of Diamond-like Carbon Thin Films deposited by DC-PECVD. The films was deposited on the corning with the ratio of Hydrogen, H2 (97%) and Methane, CH4 (3%). The temperatures were varied between 200°C to 600°C while maintaining other important variables such as DC voltage (1.5kV) and pressure (1 x 10-1 torr). From the light transmission using UV-Vis spectroscopy it was found that the type of optical transition is allowed indirect transition in the range of 3.8eV to 4.3eV. The ellipsometry is to determine the thickness, d. The thickness decreases with the increase of substrate deposition temperature. Photoluminescence properties were studied using photoluminescence spectrometer. The photoluminescence analysis was order to obtain the peak of excitation and emission range of the sample films. It has been found that the transition energy in the range of (3.06-3.22)eV.
format	Thesis
qualification_level	Master's degree
author	Ab. Rahman, Nur Alifah
author_facet	Ab. Rahman, Nur Alifah
author_sort	Ab. Rahman, Nur Alifah
title	UV-Vis characterization of diamond-like carbon thin films deposited using (DC-PECVD)
title_short	UV-Vis characterization of diamond-like carbon thin films deposited using (DC-PECVD)
title_full	UV-Vis characterization of diamond-like carbon thin films deposited using (DC-PECVD)
title_fullStr	UV-Vis characterization of diamond-like carbon thin films deposited using (DC-PECVD)
title_full_unstemmed	UV-Vis characterization of diamond-like carbon thin films deposited using (DC-PECVD)
title_sort	uv-vis characterization of diamond-like carbon thin films deposited using (dc-pecvd)
granting_institution	Universiti Teknologi Malaysia, Faculty of Science
granting_department	Faculty of Science
publishDate	2010
url	http://eprints.utm.my/id/eprint/16745/7/NurAlifahAbMFSA2010.pdf
_version_	1747815117470302208

UV-Vis characterization of diamond-like carbon thin films deposited using (DC-PECVD)

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