Structural characterization of silicon nanowires grown by a 150 MHz very high frequency plasma enhanced chemical vapor deposition

Structural characterization of silicon nanowires grown by a 150 MHz very high frequency plasma enhanced chemical vapor deposition

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Main Author: Hamidinezhad, Habib
Format: Thesis
Published: 2011
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id my-utm-ep.31308
record_format uketd_dc
spelling my-utm-ep.313082013-05-07T02:39:00Z Structural characterization of silicon nanowires grown by a 150 MHz very high frequency plasma enhanced chemical vapor deposition 2011-00 Hamidinezhad, Habib Unspecified 2011-00 Thesis http://eprints.utm.my/id/eprint/31308/ phd doctoral Universiti Teknologi Malaysia, Faculty of Science Faculty of Education
institution Universiti Teknologi Malaysia
collection UTM Institutional Repository
topic Unspecified
spellingShingle Unspecified
Hamidinezhad, Habib
Structural characterization of silicon nanowires grown by a 150 MHz very high frequency plasma enhanced chemical vapor deposition
description
format Thesis
qualification_name Doctor of Philosophy (PhD.)
qualification_level Doctorate
author Hamidinezhad, Habib
author_facet Hamidinezhad, Habib
author_sort Hamidinezhad, Habib
title Structural characterization of silicon nanowires grown by a 150 MHz very high frequency plasma enhanced chemical vapor deposition
title_short Structural characterization of silicon nanowires grown by a 150 MHz very high frequency plasma enhanced chemical vapor deposition
title_full Structural characterization of silicon nanowires grown by a 150 MHz very high frequency plasma enhanced chemical vapor deposition
title_fullStr Structural characterization of silicon nanowires grown by a 150 MHz very high frequency plasma enhanced chemical vapor deposition
title_full_unstemmed Structural characterization of silicon nanowires grown by a 150 MHz very high frequency plasma enhanced chemical vapor deposition
title_sort structural characterization of silicon nanowires grown by a 150 mhz very high frequency plasma enhanced chemical vapor deposition
granting_institution Universiti Teknologi Malaysia, Faculty of Science
granting_department Faculty of Education
publishDate 2011
_version_ 1747815772493709312

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