Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD
Nanocrystalline silicon thin film is a promising material potentially used in the optoelectronic field due to its improved and unique properties. In this work, nanocrystalline silicon thin films were grown by using a 150MHz VHF-PECVD to study the effect of deposition times, substrate temperatures an...
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Main Author: | Tarjudin, Nurul Aini |
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Format: | Thesis |
Language: | English |
Published: |
2012
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Subjects: | |
Online Access: | http://eprints.utm.my/id/eprint/32428/5/NurulAiniTarjudinMFS2012.pdf |
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