Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD

Structural and optical properties of nanocrystalline silicon thin films grown by 150MHz VHF-PECVD

Nanocrystalline silicon thin film is a promising material potentially used in the optoelectronic field due to its improved and unique properties. In this work, nanocrystalline silicon thin films were grown by using a 150MHz VHF-PECVD to study the effect of deposition times, substrate temperatures an...

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書目詳細資料
主要作者:	Tarjudin, Nurul Aini
格式:	Thesis
語言:	English
出版:	2012
主題:	Q Science (General)
在線閱讀:	http://eprints.utm.my/id/eprint/32428/5/NurulAiniTarjudinMFS2012.pdf
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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