Optical properties measurements of nanocrystalline silicon thin films

Optical properties measurements of nanocrystalline silicon thin films

Nanocrystalline silicon (nc-Si) thin films on 7059 corning glass substrate were prepared using Very High Frequency Plasma-Enhanced Chemical Vapour Deposition (VHF-PECVD) at different deposition temperatures. The nc-Si properties film were analyzed using spectroscopic ellipsometer, ultra violet (UV-V...

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書目詳細資料
主要作者:	Gan, Chee Hong
格式:	Thesis
語言:	English
出版:	2011
主題:	Q Science (General)
在線閱讀:	http://eprints.utm.my/id/eprint/33381/1/GanCheeHongMFS2011.pdf
標簽:	添加標簽沒有標簽, 成為第一個標記此記錄!

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