Characterization of amorphous silicon-carbon alloy films (a-Si:C:H)

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Main Author: Lau, Chen Chen
Format: Thesis
Published: 2005
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id my-utm-ep.34752
record_format uketd_dc
spelling my-utm-ep.347522017-09-02T03:04:41Z Characterization of amorphous silicon-carbon alloy films (a-Si:C:H) 2005 Lau, Chen Chen Unspecified 2005 Thesis http://eprints.utm.my/id/eprint/34752/ masters Universiti Teknologi Malaysia, Faculty of Science Faculty of Science
institution Universiti Teknologi Malaysia
collection UTM Institutional Repository
topic Unspecified
spellingShingle Unspecified
Lau, Chen Chen
Characterization of amorphous silicon-carbon alloy films (a-Si:C:H)
description
format Thesis
qualification_level Master's degree
author Lau, Chen Chen
author_facet Lau, Chen Chen
author_sort Lau, Chen Chen
title Characterization of amorphous silicon-carbon alloy films (a-Si:C:H)
title_short Characterization of amorphous silicon-carbon alloy films (a-Si:C:H)
title_full Characterization of amorphous silicon-carbon alloy films (a-Si:C:H)
title_fullStr Characterization of amorphous silicon-carbon alloy films (a-Si:C:H)
title_full_unstemmed Characterization of amorphous silicon-carbon alloy films (a-Si:C:H)
title_sort characterization of amorphous silicon-carbon alloy films (a-si:c:h)
granting_institution Universiti Teknologi Malaysia, Faculty of Science
granting_department Faculty of Science
publishDate 2005
_version_ 1747816247912824832