Optical properties and photoluminescence of copper nitride thin film prepared by reactive DC sputtering
This research was conducted to prepare copper nitride thin films on glass substrates by reactive DC sputtering technique using a copper plate and nitrogen gas at 20 Pa as source. The Argon pressure 1x 10-1 mbar and DC voltage of 0.5 kV at room temperature. The deposition time varies from 1.0 hour to...
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Main Author: | Mohammed Ariff, Noor Azizun |
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Format: | Thesis |
Language: | English |
Published: |
2013
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Subjects: | |
Online Access: | http://eprints.utm.my/id/eprint/38861/5/NoorAzizunMohammedAriffMFS2013.pdf |
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