Modeling of electrostatic actuated mems cantilever beam for application as optical switch

Modeling of electrostatic actuated mems cantilever beam for application as optical switch

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Bibliographic Details
Main Author: Leow, Cheah Wei
Format: Thesis
Published: 2002
Subjects:
TK Electrical engineering
Electronics Nuclear engineering
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id my-utm-ep.43002
record_format uketd_dc
spelling my-utm-ep.430022017-06-20T02:34:47Z Modeling of electrostatic actuated mems cantilever beam for application as optical switch 2002 Leow, Cheah Wei TK Electrical engineering. Electronics Nuclear engineering 2002 Thesis http://eprints.utm.my/id/eprint/43002/ http://libraryopac.utm.my/client/en_AU/main/search/results?qu=Modeling+of+electrostatic+actuated+mems&te= masters Universiti Teknologi Malaysia, Faculty of Electrical Engineering Faculty of Electrical Engineering
institution Universiti Teknologi Malaysia
collection UTM Institutional Repository
topic TK Electrical engineering
Electronics Nuclear engineering
spellingShingle TK Electrical engineering
Electronics Nuclear engineering
Leow, Cheah Wei
Modeling of electrostatic actuated mems cantilever beam for application as optical switch
description
format Thesis
qualification_level Master's degree
author Leow, Cheah Wei
author_facet Leow, Cheah Wei
author_sort Leow, Cheah Wei
title Modeling of electrostatic actuated mems cantilever beam for application as optical switch
title_short Modeling of electrostatic actuated mems cantilever beam for application as optical switch
title_full Modeling of electrostatic actuated mems cantilever beam for application as optical switch
title_fullStr Modeling of electrostatic actuated mems cantilever beam for application as optical switch
title_full_unstemmed Modeling of electrostatic actuated mems cantilever beam for application as optical switch
title_sort modeling of electrostatic actuated mems cantilever beam for application as optical switch
granting_institution Universiti Teknologi Malaysia, Faculty of Electrical Engineering
granting_department Faculty of Electrical Engineering
publishDate 2002
_version_ 1747816907114807296

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