Nitrogen dioxide detection using copper oxide thin film sensor prepared by direct current sputtering technique

Nitrogen dioxide detection using copper oxide thin film sensor prepared by direct current sputtering technique

Semiconducting copper oxide (CuO) thin films have been deposited using DC sputtering technique using copper (Cu) target for detection of oxidizing nitrogen dioxide (NO2) gas. A series of CuO thin films (gas sensors) (C1-C7) of various thicknesses had been prepared on Corning glass substrate. The tim...

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书目详细资料
主要作者:	Mohd. Sukri, Nurul Ain
格式:	Thesis
语言:	English
出版:	2014
主题:	QC Physics
在线阅读:	http://eprints.utm.my/id/eprint/48924/25/NurulAinMohdMFS2014.pdf
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