Optical and sensing properties of sputtered indium tin oxide (ITO) thin films
Two sets of indium tin oxide thin film were prepared at different thicknesses onto the corning glass substrates using radio frequency magnetron sputtering method. Set one is for single configuration sample and set two is for sensor array sample. All samples were annealed at temperature of 600°C for...
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| Main Author: | |
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| Format: | Thesis |
| Language: | English |
| Published: |
2014
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| Subjects: | |
| Online Access: | http://eprints.utm.my/id/eprint/50684/1/MohamadHelmiMFS2014.pdf |
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