Investigation on morphology and structural properties of 2D carbon nanostructure grown via 150 MHz PECVD
A 150 MHz very high frequency plasma enhanced chemical vapor deposition (150 MHz VHF-PECVD) system was utilized to fabricate two-dimensional carbon nanostructure from the mixture of CH4 and H2. Morphology and structural properties of the grown nanostructure were investigated by means of microscopic...
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| 格式: | Thesis |
| 语言: | English |
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2015
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| 在线阅读: | http://eprints.utm.my/id/eprint/54011/25/MuhammadAkmalHasanudinMFS2015.pdf |
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