Characterization of planar and vertical n-channel mosfet in nanometer regime

In recent years, there is more and more design on MOSFET that has been developed to fulfill the market need. This project focused on the comparison of planar and vertical n-channel MOS transistor characteristic with effective channel length of 100nm down to 50nm. Planar and vertical n-channel MOS tr...

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Main Author: Sulaiman, Ima
Format: Thesis
Language:English
Published: 2007
Subjects:
Online Access:http://eprints.utm.my/id/eprint/6389/1/ImaSulaimanMFKE2007.pdf
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spelling my-utm-ep.63892018-10-14T07:19:46Z Characterization of planar and vertical n-channel mosfet in nanometer regime 2007-05 Sulaiman, Ima TK Electrical engineering. Electronics Nuclear engineering In recent years, there is more and more design on MOSFET that has been developed to fulfill the market need. This project focused on the comparison of planar and vertical n-channel MOS transistor characteristic with effective channel length of 100nm down to 50nm. Planar and vertical n-channel MOS transistors with effective channel length ranged from 50nm to 100nm has been developed. Simulation of the device design is done by using Silvaco-DevEdit. Short channel effect (SCE) is investigated through out the device simulation. SCEs affect on device and circuit performance in off-state leakage current and VT roll-off. At the device simulation process, using Silvaco Atlas, the electrical parameter is extracted to investigate the device characteristic. Several design analysis are performed to investigate the effectiveness and robustness of the method in order to prevent the varying threshold voltage or short channel effect of a MOSFET device. A single channel vertical NMOS shows better VT roll-off and better subthreshold swing at ~85mV/decade. On the other hand, planar NMOS has lower threshold voltage value which is suitable for low voltage devices. With these advantages from each NMOS analysis, one can decide which device to use to achieve required specification for specific usage in future. 2007-05 Thesis http://eprints.utm.my/id/eprint/6389/ http://eprints.utm.my/id/eprint/6389/1/ImaSulaimanMFKE2007.pdf application/pdf en public http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:62301 masters Universiti Teknologi Malaysia, Faculty of Electrical Engineering Faculty of Electrical Engineering
institution Universiti Teknologi Malaysia
collection UTM Institutional Repository
language English
topic TK Electrical engineering
Electronics Nuclear engineering
spellingShingle TK Electrical engineering
Electronics Nuclear engineering
Sulaiman, Ima
Characterization of planar and vertical n-channel mosfet in nanometer regime
description In recent years, there is more and more design on MOSFET that has been developed to fulfill the market need. This project focused on the comparison of planar and vertical n-channel MOS transistor characteristic with effective channel length of 100nm down to 50nm. Planar and vertical n-channel MOS transistors with effective channel length ranged from 50nm to 100nm has been developed. Simulation of the device design is done by using Silvaco-DevEdit. Short channel effect (SCE) is investigated through out the device simulation. SCEs affect on device and circuit performance in off-state leakage current and VT roll-off. At the device simulation process, using Silvaco Atlas, the electrical parameter is extracted to investigate the device characteristic. Several design analysis are performed to investigate the effectiveness and robustness of the method in order to prevent the varying threshold voltage or short channel effect of a MOSFET device. A single channel vertical NMOS shows better VT roll-off and better subthreshold swing at ~85mV/decade. On the other hand, planar NMOS has lower threshold voltage value which is suitable for low voltage devices. With these advantages from each NMOS analysis, one can decide which device to use to achieve required specification for specific usage in future.
format Thesis
qualification_level Master's degree
author Sulaiman, Ima
author_facet Sulaiman, Ima
author_sort Sulaiman, Ima
title Characterization of planar and vertical n-channel mosfet in nanometer regime
title_short Characterization of planar and vertical n-channel mosfet in nanometer regime
title_full Characterization of planar and vertical n-channel mosfet in nanometer regime
title_fullStr Characterization of planar and vertical n-channel mosfet in nanometer regime
title_full_unstemmed Characterization of planar and vertical n-channel mosfet in nanometer regime
title_sort characterization of planar and vertical n-channel mosfet in nanometer regime
granting_institution Universiti Teknologi Malaysia, Faculty of Electrical Engineering
granting_department Faculty of Electrical Engineering
publishDate 2007
url http://eprints.utm.my/id/eprint/6389/1/ImaSulaimanMFKE2007.pdf
_version_ 1747814648137121792