Carbon removal of mold sample by femtosecond laser

Clean mold tool is important in large scale production of high quality integrated circuit chip. Conventional mold tool cleaning techniques often involve chemicals as cleaning agent which is costly and polluting process hence light is suggested as a non-chemical agent alternative. High intensity ligh...

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Main Author:	Abu Bakar, Mohamad Aizat
Format:	Thesis
Language:	English
Published:	2018
Subjects:	QC Physics
Online Access:	http://eprints.utm.my/id/eprint/81127/1/MohamadAizatAbuMFS2018.pdf
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id	my-utm-ep.81127
record_format	uketd_dc
spelling	my-utm-ep.811272019-07-24T03:34:34Z Carbon removal of mold sample by femtosecond laser 2018-08 Abu Bakar, Mohamad Aizat QC Physics Clean mold tool is important in large scale production of high quality integrated circuit chip. Conventional mold tool cleaning techniques often involve chemicals as cleaning agent which is costly and polluting process hence light is suggested as a non-chemical agent alternative. High intensity light energy released in very short pulse duration can remove the contaminant particles from mold tool surface. Femtosecond laser of 1025 nm wavelength and pulse duration of 400 fs is utilized to remove carbon particle on chromium nitride surface. The effectiveness of carbon removal is determined by the comparison of surface imaging, elemental composition distribution and the surface roughness value of the mold tool surface condition before and after laser ablation at different powers and distances. The obtained result shows great carbon content removal of 75% and lowest induced damage percentage of 10% at laser power 1.7 W and ablation distance of 29.0 mm while highly preserving structure of the mold tool surface roughness value of 0.273 nm. Effective and precise carbon removal is achieved by using the optimum laser power and ablation distance onto target surface for laser cleaning on mold tool. The main advantage of this method is chemical free process and leading to a green technological innovation in mold tool cleaning industries. 2018-08 Thesis http://eprints.utm.my/id/eprint/81127/ http://eprints.utm.my/id/eprint/81127/1/MohamadAizatAbuMFS2018.pdf application/pdf en public http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:124764 masters Universiti Teknologi Malaysia, Faculty of Science Faculty of Science
institution	Universiti Teknologi Malaysia
collection	UTM Institutional Repository
language	English
topic	QC Physics
spellingShingle	QC Physics Abu Bakar, Mohamad Aizat Carbon removal of mold sample by femtosecond laser
description	Clean mold tool is important in large scale production of high quality integrated circuit chip. Conventional mold tool cleaning techniques often involve chemicals as cleaning agent which is costly and polluting process hence light is suggested as a non-chemical agent alternative. High intensity light energy released in very short pulse duration can remove the contaminant particles from mold tool surface. Femtosecond laser of 1025 nm wavelength and pulse duration of 400 fs is utilized to remove carbon particle on chromium nitride surface. The effectiveness of carbon removal is determined by the comparison of surface imaging, elemental composition distribution and the surface roughness value of the mold tool surface condition before and after laser ablation at different powers and distances. The obtained result shows great carbon content removal of 75% and lowest induced damage percentage of 10% at laser power 1.7 W and ablation distance of 29.0 mm while highly preserving structure of the mold tool surface roughness value of 0.273 nm. Effective and precise carbon removal is achieved by using the optimum laser power and ablation distance onto target surface for laser cleaning on mold tool. The main advantage of this method is chemical free process and leading to a green technological innovation in mold tool cleaning industries.
format	Thesis
qualification_level	Master's degree
author	Abu Bakar, Mohamad Aizat
author_facet	Abu Bakar, Mohamad Aizat
author_sort	Abu Bakar, Mohamad Aizat
title	Carbon removal of mold sample by femtosecond laser
title_short	Carbon removal of mold sample by femtosecond laser
title_full	Carbon removal of mold sample by femtosecond laser
title_fullStr	Carbon removal of mold sample by femtosecond laser
title_full_unstemmed	Carbon removal of mold sample by femtosecond laser
title_sort	carbon removal of mold sample by femtosecond laser
granting_institution	Universiti Teknologi Malaysia, Faculty of Science
granting_department	Faculty of Science
publishDate	2018
url	http://eprints.utm.my/id/eprint/81127/1/MohamadAizatAbuMFS2018.pdf
_version_	1747818308409753600

Carbon removal of mold sample by femtosecond laser

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