Integration of shape memory alloy for microactuation

Shape memory alloy (SMA) actuators in microelectromechanical system (MEMS) have a broad range of applications. The alloy material has unique properties underlying its high working density, simple structures, large displacement and excellent biocompatibility. These features have led to its commercial...

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Main Author:	Abuzaiter, Alaa A. H.
Format:	Thesis
Language:	English
Published:	2016
Subjects:	TK Electrical engineering Electronics Nuclear engineering
Online Access:	http://eprints.utm.my/id/eprint/81788/1/AlaaAHAbuzaiterPFKE2016.pdf
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spelling	my-utm-ep.817882019-09-29T10:53:52Z Integration of shape memory alloy for microactuation 2016-09 Abuzaiter, Alaa A. H. TK Electrical engineering. Electronics Nuclear engineering Shape memory alloy (SMA) actuators in microelectromechanical system (MEMS) have a broad range of applications. The alloy material has unique properties underlying its high working density, simple structures, large displacement and excellent biocompatibility. These features have led to its commercialization in several applications such as micro-robotics and biomedical areas. However, full utilization of SMA is yet to be exploited as it faces various practical issues. In the area of microactuators in particular, fabricated devices suffer from low degrees of freedom (DoF), complex fabrication processes, larger sizes and limited displacement range. This thesis presents novel techniques of developing bulk-micromachined SMA microdevices by applying integration of multiple SMA microactuators, and monolithic methods using standard and unconventional MEMS fabrication processes. The thermomechanical behavior of the developed bimorph SMA microactuator is analyzed by studying the parameters such as thickness of SMA sheet, type and thickness of stress layer and the deposition temperature that affect the displacement. The microactuators are then integrated to form a novel SMA micromanipulator that consists of two links and a gripper at its end to provide three-DoF manipulation of small objects with overall actuation x- and y- axes displacement of 7.1 mm and 5.2 mm, respectively. To simplify the fabrication and improve the structure robustness, a monolithic approach was utilized in the development of a micro-positioning stage using bulk-micromachined SMA sheet that was fabricated in a single machining step. The design consisted of six spring actuators that provided large stage displacement range of 1.2 mm and 1.6 mm in x- and y-axes, respectively, and a rotation of 20° around the z-axis. To embed a self-sensing functionality in SMA microactuators, a novel wireless displacement sensing method based on integration of an SMA spiral-coil actuator in a resonant circuit is developed. These devices have the potential to promote the application of bulk-micromachined SMA actuator in MEMS area. 2016-09 Thesis http://eprints.utm.my/id/eprint/81788/ http://eprints.utm.my/id/eprint/81788/1/AlaaAHAbuzaiterPFKE2016.pdf application/pdf en public http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:126373 phd doctoral Universiti Teknologi Malaysia, Faculty of Electrical Engineering Faculty of Electrical Engineering
institution	Universiti Teknologi Malaysia
collection	UTM Institutional Repository
language	English
topic	TK Electrical engineering Electronics Nuclear engineering
spellingShingle	TK Electrical engineering Electronics Nuclear engineering Abuzaiter, Alaa A. H. Integration of shape memory alloy for microactuation
description	Shape memory alloy (SMA) actuators in microelectromechanical system (MEMS) have a broad range of applications. The alloy material has unique properties underlying its high working density, simple structures, large displacement and excellent biocompatibility. These features have led to its commercialization in several applications such as micro-robotics and biomedical areas. However, full utilization of SMA is yet to be exploited as it faces various practical issues. In the area of microactuators in particular, fabricated devices suffer from low degrees of freedom (DoF), complex fabrication processes, larger sizes and limited displacement range. This thesis presents novel techniques of developing bulk-micromachined SMA microdevices by applying integration of multiple SMA microactuators, and monolithic methods using standard and unconventional MEMS fabrication processes. The thermomechanical behavior of the developed bimorph SMA microactuator is analyzed by studying the parameters such as thickness of SMA sheet, type and thickness of stress layer and the deposition temperature that affect the displacement. The microactuators are then integrated to form a novel SMA micromanipulator that consists of two links and a gripper at its end to provide three-DoF manipulation of small objects with overall actuation x- and y- axes displacement of 7.1 mm and 5.2 mm, respectively. To simplify the fabrication and improve the structure robustness, a monolithic approach was utilized in the development of a micro-positioning stage using bulk-micromachined SMA sheet that was fabricated in a single machining step. The design consisted of six spring actuators that provided large stage displacement range of 1.2 mm and 1.6 mm in x- and y-axes, respectively, and a rotation of 20° around the z-axis. To embed a self-sensing functionality in SMA microactuators, a novel wireless displacement sensing method based on integration of an SMA spiral-coil actuator in a resonant circuit is developed. These devices have the potential to promote the application of bulk-micromachined SMA actuator in MEMS area.
format	Thesis
qualification_name	Doctor of Philosophy (PhD.)
qualification_level	Doctorate
author	Abuzaiter, Alaa A. H.
author_facet	Abuzaiter, Alaa A. H.
author_sort	Abuzaiter, Alaa A. H.
title	Integration of shape memory alloy for microactuation
title_short	Integration of shape memory alloy for microactuation
title_full	Integration of shape memory alloy for microactuation
title_fullStr	Integration of shape memory alloy for microactuation
title_full_unstemmed	Integration of shape memory alloy for microactuation
title_sort	integration of shape memory alloy for microactuation
granting_institution	Universiti Teknologi Malaysia, Faculty of Electrical Engineering
granting_department	Faculty of Electrical Engineering
publishDate	2016
url	http://eprints.utm.my/id/eprint/81788/1/AlaaAHAbuzaiterPFKE2016.pdf
_version_	1747818414264549376

Integration of shape memory alloy for microactuation

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