Performance evaluation of finfet silicide based contact through electrical simulation

Continues scaling of device dimension allows the complex integration of increasing number of transistors in a single chip possible. As the semiconductor industry move according to Moore’s law, the scaling down of field effect transistor (FET) has reached less than 10 nm. The conventional planar FET...

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Main Author:	Aini, Muhammad Adli
Format:	Thesis
Language:	English
Published:	2021
Subjects:	HT101-395 Sociology Urban
Online Access:	http://eprints.utm.my/id/eprint/96835/1/AdliaAiniMSKE2021.pdf.pdf
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spelling	my-utm-ep.968352022-08-23T06:51:30Z Performance evaluation of finfet silicide based contact through electrical simulation 2021 Aini, Muhammad Adli HT101-395 Sociology, Urban Continues scaling of device dimension allows the complex integration of increasing number of transistors in a single chip possible. As the semiconductor industry move according to Moore’s law, the scaling down of field effect transistor (FET) has reached less than 10 nm. The conventional planar FET structure can no longer withstand the short channel effect that become pronounce at ultra-narrow channel length. Therefore, alternative transistor architecture FinFET had been introduced. However, the focus to obtain minimal device leakage from this structure is still on-going due to the thin width of fin that causing an incease in parasitic resistance. In this study, silicidation will be implemented on 10nm FinFET structure and analysed through electrical simulations. The parameters studied in this research are threshold voltage (Vth), off current (Ioff), saturation current (Isat), subthreshold slope (SS) and resistance out (Rout). The silicidation process will involve using following materials which are Silicide, Cobalt Silicide, Nickel Silicide, TiSilicide and Tungsten Silicide. Results from the simulations founds that device power leakage reduced by almost 24% when implemented with Nickle Silicde layer. Futher optimization and simulations will provide insight for engineer in implementing silicidation in short channel devices. 2021 Thesis http://eprints.utm.my/id/eprint/96835/ http://eprints.utm.my/id/eprint/96835/1/AdliaAiniMSKE2021.pdf.pdf application/pdf en public http://dms.library.utm.my:8080/vital/access/manager/Repository/vital:142171 masters Universiti Teknologi Malaysia Faculty of Engineering - School of Electrical Engineering
institution	Universiti Teknologi Malaysia
collection	UTM Institutional Repository
language	English
topic	HT101-395 Sociology Urban
spellingShingle	HT101-395 Sociology Urban Aini, Muhammad Adli Performance evaluation of finfet silicide based contact through electrical simulation
description	Continues scaling of device dimension allows the complex integration of increasing number of transistors in a single chip possible. As the semiconductor industry move according to Moore’s law, the scaling down of field effect transistor (FET) has reached less than 10 nm. The conventional planar FET structure can no longer withstand the short channel effect that become pronounce at ultra-narrow channel length. Therefore, alternative transistor architecture FinFET had been introduced. However, the focus to obtain minimal device leakage from this structure is still on-going due to the thin width of fin that causing an incease in parasitic resistance. In this study, silicidation will be implemented on 10nm FinFET structure and analysed through electrical simulations. The parameters studied in this research are threshold voltage (Vth), off current (Ioff), saturation current (Isat), subthreshold slope (SS) and resistance out (Rout). The silicidation process will involve using following materials which are Silicide, Cobalt Silicide, Nickel Silicide, TiSilicide and Tungsten Silicide. Results from the simulations founds that device power leakage reduced by almost 24% when implemented with Nickle Silicde layer. Futher optimization and simulations will provide insight for engineer in implementing silicidation in short channel devices.
format	Thesis
qualification_level	Master's degree
author	Aini, Muhammad Adli
author_facet	Aini, Muhammad Adli
author_sort	Aini, Muhammad Adli
title	Performance evaluation of finfet silicide based contact through electrical simulation
title_short	Performance evaluation of finfet silicide based contact through electrical simulation
title_full	Performance evaluation of finfet silicide based contact through electrical simulation
title_fullStr	Performance evaluation of finfet silicide based contact through electrical simulation
title_full_unstemmed	Performance evaluation of finfet silicide based contact through electrical simulation
title_sort	performance evaluation of finfet silicide based contact through electrical simulation
granting_institution	Universiti Teknologi Malaysia
granting_department	Faculty of Engineering - School of Electrical Engineering
publishDate	2021
url	http://eprints.utm.my/id/eprint/96835/1/AdliaAiniMSKE2021.pdf.pdf
_version_	1747818688645431296

Performance evaluation of finfet silicide based contact through electrical simulation

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