Fabrication of nanopore with different parameters in depth and diameter on silicon substrate using one-step focused ion beam milling
Focused ion beam (FIB) technique uses a focused beam of ions to scan the surface of a specimen, analogous to the way scanning electron microscope utilizes electrons. Recent developments of FIB technology have emerged as one of the most advanced multifunctional platforms for nanofabrication. It is a...
Saved in:
Main Author: | |
---|---|
Format: | Thesis |
Language: | English |
Published: |
2022
|
Subjects: | |
Online Access: | http://eprints.utm.my/id/eprint/99715/1/SufiNazihahSabiliMMJIIT2022.pdf |
Tags: |
Add Tag
No Tags, Be the first to tag this record!
|
Be the first to leave a comment!