Scheduling Algorithm For Lot Movement in Semiconductor Wafer Fabrication

Dynamic scheduling for semiconductor wafer FAB is necessary in a complex semiconductor manufacturing environment. An effective material handling scheduling is important in order to avoid tool sits idle waiting for the lot delivery, which resulting in a longer cycle time. Two primary approaches to th...

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Bibliographic Details
Main Author: Norzieyuswati, Md Zenal
Format: Thesis
Language:eng
eng
Published: 2008
Subjects:
Online Access:https://etd.uum.edu.my/935/1/Norzieyuswati_Md_Zenal.pdf
https://etd.uum.edu.my/935/2/Norzieyuswati_Md_Zenal.pdf
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Summary:Dynamic scheduling for semiconductor wafer FAB is necessary in a complex semiconductor manufacturing environment. An effective material handling scheduling is important in order to avoid tool sits idle waiting for the lot delivery, which resulting in a longer cycle time. Two primary approaches to the scheduling problem in the semiconductor wafer fabrication industry, which are heuristic rules and Artificial Intelligence (AI) optimization method, are discussed. Imitating the collective activities of ant colonies, an approach to constructing pheromone-based scheduling algorithm using Ant Colony Optimization for lot movement in semiconductor wafer fabrication process is propose to be implemented in SilTerra Malaysia.