Scheduling Algorithm For Lot Movement in Semiconductor Wafer Fabrication
Dynamic scheduling for semiconductor wafer FAB is necessary in a complex semiconductor manufacturing environment. An effective material handling scheduling is important in order to avoid tool sits idle waiting for the lot delivery, which resulting in a longer cycle time. Two primary approaches to th...
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| 格式: | Thesis |
| 语言: | eng eng |
| 出版: |
2008
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| 在线阅读: | https://etd.uum.edu.my/935/1/Norzieyuswati_Md_Zenal.pdf https://etd.uum.edu.my/935/2/Norzieyuswati_Md_Zenal.pdf |
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