Performance in enhancement of microfluidic-based capacitive pressure sensor

This study aims to enhance the performance of microfluidic-based capacitive pressuresensor using square membrane shapes and ellipse and square-shaped microchannel patterns.This study also investigates the pressure sensor using propylene carbonate as electrolyte in termof boiling point and dielectric...

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Bibliographic Details
Main Author: Muhammad Rashidi Ab Razak
Format: thesis
Language:eng
Published: 2020
Subjects:
Online Access:https://ir.upsi.edu.my/detailsg.php?det=6833
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Summary:This study aims to enhance the performance of microfluidic-based capacitive pressuresensor using square membrane shapes and ellipse and square-shaped microchannel patterns.This study also investigates the pressure sensor using propylene carbonate as electrolyte in termof boiling point and dielectric constant. The microfluidic-based capacitive pressure sensorinvestigates for pressure measurement by using square and ellipse-shaped microchannel patterns. When a pressure was applied on to the membrane, it provides deflection anddisplaces the liquid inside the microchannel. The liquid movement induces changes incapacitance. During the design stage, a simulation analysis on two different membranestructures, including square and rectangular, were studied. In addition, two differentmicrochannel designs, including ellipse and square shape pattern, were designed and simulated. Thefinalized sensor design was fabricated using soft lithography, printed circuit board (PCB) andsealing process. Then, a fluidic-based pressure sensor was characterized based on fluidmechanism, pressure measurement, temperature effect and lifetime effect. Theexperimental result showed that the fluid mechanism for the ellipse-shapedmicrochannel was linearly increased as the pressure increase compared to the square shape which wasnon-linear. For pressure measurement, error percentage of hysteresis was obtained for theellipse-shaped microchannel is 0.6% which was quite low compared to the square-shapedmicrochannel, which is 23% of error. For the temperature effect of the ellipse-shapedmicrochannel, its capacitance increased about 0.86% ranging from 20 to 50 ?C, which issuitable for a sensor to operate at room temperature. The use of the propylene carbonateincreased the lifespan of the sensor due to its boiling point property. In conclusion, afluidic-based capacitive pressure sensor was successfully developed using a square and an ellipse-shaped microchannel. The ellipse-shaped microchannel showedexcellent performance than the square-shaped microchannel. For the research implication,it can be used by researchers as a guideline and reference especially in developing pressure sensors.