Robust microfluidic flow sensor with a biologically inspired cupula structure for flow rate measurement
<p>This research is about the development of robust microfluidic flow sensor with a</p><p>biologically-inspired cupula structure for flow rate measurement. The proposed flow</p><p>sensor consists of a dome-shaped structure, microc...
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| 格式: | thesis |
| 语言: | eng |
| 出版: |
2022
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| 主题: | |
| 在线阅读: | https://ir.upsi.edu.my/detailsg.php?det=9705 |
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| 总结: | <p>This research is about the development of robust microfluidic flow sensor with a</p><p>biologically-inspired cupula structure for flow rate measurement. The proposed flow</p><p>sensor consists of a dome-shaped structure, microchannel and coplanar electrode.</p><p>Mechanical analysis of the dome-shaped membrane is carried out by using finite</p><p>element analysis in terms of deflection and Misses Stress. The simulations using</p><p>Ansys software were carried out for both Computational Fluid Dynamic (CFD) and</p><p>Finite Element Analysis (FEA). A sensor with a 3.2 mm radius of dome and 0.5 mm</p><p>in dome thickness had been selected from the simulation due to its flexibility. The</p><p>mold of the flow sensor was designed by using Solidwork 2016 and fabricated using</p><p>soft lithography process including casting and molding process in</p><p>Polydimethysiloxane (PDMS) structure fabrication. The electrode was fabricated by</p><p>using Printed Circuit Board (PCB) process. It was design by using EAGLE software.</p><p>There were a few processes that involved in PCB process which were printing</p><p>process, exposure process, developer process and etching process. Last process is a</p><p>sealing process, where both fabricated PDMS structure and electrode were seal and</p><p>carefully aligned. Polydimethylsiloxane (PDMS) is used as a membrane due to its</p><p>high elasticity compared to other polymers. Propylene carbonate (PC) electrolyte is</p><p>used for its high dielectric constant that gives good performance in terms of its high</p><p>boiling point which improves the longevity of the liquid inside the microchannel.</p><p>Based on the experimental results, the operating frequency and the flow rate of the</p><p>flow sensor were ideally observed at 4.4 kHz and between 0 to 0.17 UM/s The</p><p>effects of temperature and pressure were recorded and discussed in this research.</p> |
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