Effect of DC magnetron sputtering on aluminium nitride (AIN) thin films /
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| Main Author: | |
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| Format: | Thesis Book |
| Language: | English |
| Published: |
2014
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| LEADER | 01016cam a2200289 i 4500 | ||
|---|---|---|---|
| 001 | u1009602 | ||
| 003 | SIRSI | ||
| 005 | 201501301553 | ||
| 008 | 150130s2014 my a t 000 0 eng m | ||
| 040 | |a UMM |e rda | ||
| 090 | |a QC3 |b UM 2014 Mohasas | ||
| 100 | 0 | |a Mohd Adreen Shah Azman Shah, |e author. | |
| 245 | 1 | 0 | |a Effect of DC magnetron sputtering on aluminium nitride (AIN) thin films / |c Mohd Adreen Shah bin Azman Shah |
| 264 | 1 | |c 2014 | |
| 264 | 4 | |c 2014 | |
| 300 | |a vi, 54 leaves : |b illustrations ; |c 30 cm | ||
| 336 | |a text |2 rdacontent | ||
| 337 | |a unmediated |2 rdamedia | ||
| 338 | |a volume |2 rdacarrier | ||
| 502 | |b M.Sc. |c Jabatan Fizik, Fakulti Sains, Universiti Malaya, |d 2014 | ||
| 504 | |a Bibliography: leaves 50-52 | ||
| 650 | 0 | |a Aluminum nitride | |
| 650 | 0 | |a Thin films | |
| 710 | 2 | |a Universiti Malaya. |b Fakulti Sains, |e degree granting institution. | |
| 900 | |a NSR | ||
| 596 | |a 1 | ||
| 999 | |a QC3 UM 2014 MOHASAS |w LC |c 1 |i A516176159 |d 3/2/2016 |f 3/2/2016 |g 1 |l STACKS |m P01UTAMA |r Y |s Y |t TESIS |u 21/1/2016 |1 STEM | ||